2011
DOI: 10.5402/2011/639714
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Stacking Fault Energy of Si Nanocrystals Embedded in SiO2

Abstract: Si nanocrystals (Si nc) were produced by the implantation of Si + into a SiO 2 film on (100) Si, followed by high-temperature annealing. High-resolution transmission electron microscopy (HRTEM) observation has shown that a perfect dislocation (Burgers vector b = (1/2) 110 ) can dissociate into two Shockley partials (Burgers vector b = (1/6) 112 ) bounding a strip of stacking faults (SFs). The width of the SFs has been determined from the HRTEM image, and the stacking fault energy for Si nc has been calculated.… Show more

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Cited by 2 publications
(4 citation statements)
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“…36 and 37. We should also note that the conclusion in ref. 37 includes the prediction that defects should strongly inuence the photoluminescence emission.…”
Section: Resultsmentioning
confidence: 99%
See 3 more Smart Citations
“…36 and 37. We should also note that the conclusion in ref. 37 includes the prediction that defects should strongly inuence the photoluminescence emission.…”
Section: Resultsmentioning
confidence: 99%
“…Since the annealing temperature does not exceed the fabrication temperature, we believe that the improvement in quality is due to defect redistribution caused by both the annealing and decrease in particle size. 37,38 For example in ref. 37 dislocation dissociation in Si nanocrystals was demonstrated as a result of annealing.…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations