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2021
DOI: 10.1109/tasc.2021.3060678
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Stacked Josephson Junction Arrays for the Pulse-Driven AC Josephson Voltage Standard

Abstract: We developed a fabrication process to establish large arrays of up to 5-stacked Josephson junctions for the Josephson Arbitrary Waveform Synthesizer (JAWS). SNS-type Josephson junctions with NbxSi1-x barriers are used for this application. By modifying our standard window process, e.g. to add a CMP (chemical mechanical polishing) and an ALD (atomic layer deposition) step, the yield of this process was increased. An output voltage of 1 V RMS could be achieved by using 4 JAWS arrays in series with a total number… Show more

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Cited by 12 publications
(11 citation statements)
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References 13 publications
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“…The samples were fabricated by Oliver Kieler (Braunschweig, Germany) and were measured in AlbaNova University Center (Stockholm, Sweden). The fabrication is a self-aligning process using e-beam lithography and reactive ion etching [16,17]. Similar arrays were studied earlier in [9,12,13], where additional information about sample characterization can be found.…”
Section: Experimental Samplesmentioning
confidence: 99%
“…The samples were fabricated by Oliver Kieler (Braunschweig, Germany) and were measured in AlbaNova University Center (Stockholm, Sweden). The fabrication is a self-aligning process using e-beam lithography and reactive ion etching [16,17]. Similar arrays were studied earlier in [9,12,13], where additional information about sample characterization can be found.…”
Section: Experimental Samplesmentioning
confidence: 99%
“…In this way the CPW can be shorter for the same number of JJs improving pulse dispersion and, in addition, coupling between the junctions is stronger. A sophisticated 'window type' process for the fabrication of up to 5-stacked JJ arrays was developed at PTB (Kieler et al 2021). The thicknesses of resist as well as of the Nb and SiO 2 layers were increased.…”
Section: Stacked Jjsmentioning
confidence: 99%
“…Для реализации эталона переменного напряжения Бенцем и Гамильтоном в 1996 г. был предложен синтезатор сигналов произвольной формы на основе ниобиевых джозефсоновских контактов [3,4]. В синтезаторе цепочка джозефсоновских контактов управляется импульсами тока, которые позволяют генерировать переменный сигнал произвольной формы с квантовой точностью [5][6][7]. В настоящее время квантовые синтезаторы сигналов произвольной формы на основе низкотемпературных сверхпроводников используются в джонсовской термометрии, эталонах переменного напряжения, калибровке термопреобразователей и т. д.…”
Section: Introductionunclassified