1997
DOI: 10.1117/1.601142
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Stable lateral-shearing interferometer for production-line inspection of lenses

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Cited by 10 publications
(4 citation statements)
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“…2 Lateral-shearing interferometer may also be regarded as another form of common-path design in which the reference wave is produced from the measurement wave with a small lateral offset by using diffraction gratings or prisms. 3 Use of a scatter-plate also enables to obtain a form of common-path configuration with high immunity to vibration. 4 Vibration influence may also be suppressed in an active way of direct feedback control incorporating adequate vibration sensing and subsequent wave front adjustment.…”
Section: Introductionmentioning
confidence: 99%
“…2 Lateral-shearing interferometer may also be regarded as another form of common-path design in which the reference wave is produced from the measurement wave with a small lateral offset by using diffraction gratings or prisms. 3 Use of a scatter-plate also enables to obtain a form of common-path configuration with high immunity to vibration. 4 Vibration influence may also be suppressed in an active way of direct feedback control incorporating adequate vibration sensing and subsequent wave front adjustment.…”
Section: Introductionmentioning
confidence: 99%
“…To make the required phase shifting, many types of shearing interferometers using PZT or moving prism were developed. 3,4 But because PZT has many error sources such as the nonlinearity, hysteresis, temperature dependency etc. 3 , and the moving distance of PZT or prism giving the required phase shifting is as short as the wavelength λ, reducing the phase shifting error in the lateral shearing interferometer is always one of the major issues.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5] And with the aids of the rapid computer system, the phase shifting interferometry(PSI) is also widly used to analyze the wavefront. PSI technique needs a series of interferograms which have a series of phase differences between the reference wavefront and the object wavefront.…”
Section: Introductionmentioning
confidence: 99%
“…The point-diffraction interferometer by Smartt and Steel [2] is an example which generates a reference wave from the focused measurement wave through a pinhole. The lateral shearing interferometer is a common-path interferometer, and optical pick-up lenses in a production line were tested by Cho and Kim [3]. The scatter plate interferometer is also a common-path interferometer with high immunity to external vibration [4].…”
Section: Introductionmentioning
confidence: 99%