1988
DOI: 10.1088/0022-3727/21/5/028
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Stable glow plasma at atmospheric pressure

Abstract: A stable glow plasma at atmospheric pressure has been achieved for plasma treatment under selected conditions, for example the structure of electrodes, the kind of dilute gas, and the frequency of power. The surface fluorination of PET film and carbon thin-film deposition by such a plasma is described here. The surface energy can be controlled by plasma treatment of various concentrations (O2/CF4/He) in the same way as the lower pressure method that has been reported by Kogoma and co-workers (1987). Active spe… Show more

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Cited by 654 publications
(344 citation statements)
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“…Such a current profile is characteristic of helium DBD operating under homogeneous mode and is referred to as the atmospheric pressure glow discharge (APGD). 42 This will be further confirmed ahead, as we discuss the typical electron and ion densities observed in APGD. It should also be noted that the current profiles for DBD with no packing, for frequencies 20 kHz [ Fig.…”
Section: Resultssupporting
confidence: 70%
“…Such a current profile is characteristic of helium DBD operating under homogeneous mode and is referred to as the atmospheric pressure glow discharge (APGD). 42 This will be further confirmed ahead, as we discuss the typical electron and ion densities observed in APGD. It should also be noted that the current profiles for DBD with no packing, for frequencies 20 kHz [ Fig.…”
Section: Resultssupporting
confidence: 70%
“…These require observation of either the voltage-charge Lissajous figures or the characteristics of the discharge current. [J Tepper, 2000;S Kanazawa., 1988;T Yokoyama, 1990] The discharge behaviour was observed for #325, 0.035 mm wire mesh and perforated aluminium sheet with 1.2 mm diameter holes, at supply voltages to the reactor of 1.2, 1.4, 1.6 and 1.8 kV for a 1.5 mm gap spacing. The gas flow rate was 1 l/min and the gas pressures was 1 bar.…”
Section: Experimental Investigationmentioning
confidence: 99%
“…At atmospheric pressure the discharge is normally unstable, and in most cases it tends to change to a filamentary discharge, [F Massines, 1998;J Tepper, 2000;S Kanazawa., 1988], depending on the feed gas, the material of the dielectric barrier, the structure of the discharge electrode, the frequency of the pulsed supply, the gap spacing and the humidity of the gas.…”
Section: Introductionmentioning
confidence: 99%
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“…Atmospheric pressure dielectric barrier discharges (APDBDs) were firstly reported by Kanazawa et al in 1988 [1]. Recently, the APDBDs attracted great interests in many fields, especially in the exhaust gas treatment [2], biomedicine [3,4] fields.…”
Section: Introductionmentioning
confidence: 99%