1989
DOI: 10.1007/bf01174496
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Stability to moisture for chemically vapour-deposited boron nitride

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Cited by 93 publications
(53 citation statements)
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“…[20] After the heat treatment under hot steam, white ammonium pentaborate tetrahydrate (NH4B5O8·4H2O) powder is deposited on the inner wall of the quartz tube downstream of the Ar outlet, [21] as confirmed by the X-ray diffraction (XRD) analysis (Supporting Information Figure S3). The initially pure deionized water in the disposal unit has a high level of ammonia, as confirmed by the Nessler's reagent test (Supporting Information Figure S4).…”
mentioning
confidence: 99%
“…[20] After the heat treatment under hot steam, white ammonium pentaborate tetrahydrate (NH4B5O8·4H2O) powder is deposited on the inner wall of the quartz tube downstream of the Ar outlet, [21] as confirmed by the X-ray diffraction (XRD) analysis (Supporting Information Figure S3). The initially pure deionized water in the disposal unit has a high level of ammonia, as confirmed by the Nessler's reagent test (Supporting Information Figure S4).…”
mentioning
confidence: 99%
“…The presence of oxygen in the BN layer is ascribed to boric acid impurity in the BN layer 95 . The BN layer, which is unstable to water vapor 96 even in ambient conditions 97 , could have reacted with some moisture from the environment that was present in the desiccator. Presence of Si and C are attributed to signals coming from the fiber beneath the BN layer.…”
Section: Characterization Of Fibers Prior To Oxidationmentioning
confidence: 99%
“…High internal porosity with unsaturated B-N bonds favors the hydrolysis of BN by moisture and could explain the degradation of films through the formation of ammonium borate hydrate crystals, as previously reported for unstable thermal CVD BN films. 19,20 Nevertheless, when the films are deposited on the cathode using the B 2 H 6 -N 2 mixture, the tensile stress and the low surface mobility of adsorbed species might be counteracted by the beneficial effects of ion bombardment, favoring the growth of dense, adherent, and stable films. On the contrary, the damaging effect of ion bombardment through excessive compressive stress is reflected in the deposition of cathodic films from the B 2 H 6 -H 2 -NH 3 mixture.…”
Section: Discussionmentioning
confidence: 99%
“…In addition, despite the work done in characterizing the properties of BN films, relatively few reports deal with their stability when aging and exposed to atmosphere. Several stability studies have been reported for BN films obtained by thermal CVD, [19][20][21] but there is a lack of similar studies for PECVD BN films. Stability is crucial in determining the suitability of a thin-film material for application as a protective coating.…”
Section: Introductionmentioning
confidence: 99%