Stability of hydrogenated amorphous carbon thin films for application in electronic devices

Alotaibi, Sattam; Manjunatha, Krishna Nama

doi:10.1016/j.diamond.2018.10.016

Cited by 12 publications

(6 citation statements)

References 43 publications

(86 reference statements)

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“…They can be used to increase hardness [ 1 , 2 , 3 ], improve wear resistance, reduce the coefficient of friction [ 1 , 2 , 3 , 4 , 5 ] and enhance the biocompatibility of the modified surface [ 6 , 7 ] or its resistance to colonisation by micro-organisms [ 7 , 8 ]. Due to their advantages, diamond-like carbon (DLC) coatings are tested in a wide range of applications in very different areas: biomedicine [ 5 , 6 , 7 , 8 , 9 ], machining [ 10 , 11 ], electronics [ 12 , 13 ] and electrochemistry [ 14 , 15 ]. To date, there are many known techniques for producing DLC coatings, with the dominant methods being chemical vapour deposition (CVD) and physical vapour deposition (PVD).…”

Section: Introductionmentioning

confidence: 99%

Impact of Plasma Pre-Treatment on the Tribological Properties of DLC Coatings on PDMS Substrates

et al. 2021

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The processes of the deposition of carbon coatings on PDMS (polydimethylsiloxane) substrates using plasma techniques are widely used in a large number of studies, in applications ranging from electronic to biological. That is why the potential improvement of their functional properties, including tribological properties, seems very interesting. This paper presents an analysis of the impact of plasma pre-treatment on the properties of the produced diamond-like carbon (DLC) coatings, including changes in the coefficients of friction and wear rates. The initial modification processes were performed using two different techniques based on low-pressure plasma (RF PACVD, radio-frequency plasma-assisted chemical vapour deposition) and dielectric barrier discharge (DBD) plasma. The effects of the above-mentioned treatments on the geometric structure of the PDMS surface and its water contact angles and stability over time were determined. The basic properties of the DLC coatings produced on unmodified substrates were compared to those of the coatings subjected to plasma pre-treatment. The most interesting effects in terms of tribological properties were achieved after the DBD process and production of DLC coatings, achieving a decrease in wear rates to 2.45 × 10−8 mm3/Nm. The tests demonstrate that the cross-linking of the polymer substrate occurs during plasma pre-treatment.

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Section: Introductionmentioning

confidence: 99%

Impact of Plasma Pre-Treatment on the Tribological Properties of DLC Coatings on PDMS Substrates

et al. 2021

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“…Por otro lado, cuando la presión de trabajo durante el depósito es mayor, las colisiones entre las partículas del material y las partículas del gas se incrementa, provocando que el número de colisiones en el trayecto sea mayor. Cuando la presión de trabajo es mayor la energía con la que las partículas colisionan contra el sustrato favorece un crecimiento preferencial de ciertos planos cristalinos en los materiales [8][9][10][11][12][13][14][15][16]. Por otro lado, la potencia de depósito está definida como la corriente (W) que se aplica en el cátodo para desprender el material.…”

Section: Introductionunclassified

Influencia de la potencia de depósito en la morfología de películas delgadas de óxidos de molibdeno depositadas por el método de sputtering.

2022

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En este trabajo se presenta la influencia de la potencia en el depósito por sputtering en la morfología de películas delgadasde óxidos de molibdeno. Las películas fueron depositadas variando la potencia de depósito en 10, 20, 30, 40 y 50 W, endonde los espesores de las películas fueron de 46, 72, 218, 222 y 226 nm respectivamente. Las películas de óxido demolibdeno tienen una contribución de diferentes fases de los óxidos de molibdeno como MoO2 (tetragonal yortorrómbica), MoO3 (ortorrómbica) y el Mo30 (cúbica). La variación en la potencia de depósito permite el crecimientopreferencial de ciertos planos cristalinos de los óxidos de molibdeno. Las películas a bajas potencias presentaron unasuperficie homogénea con la aparición de algunos precipitados. Mientras que las películas depositadas con una potenciamayor presentaron una morfología en forma de barras orientadas en diferentes direcciones. El índice de refracción de laspelículas con una morfología de barras es mayor que el índice de refracción de las películas depositadas a una menorpotencia. Lo que confirma que el paso de la luz a través de la superficie es mucho mas lento para las películas depositadasa potencias mayores de 30 W que para las películas depositadas a 10 y 20 W.

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“…Their electrical and electronic properties also change. The optical band gap and electrical resistivity are in the range of 0.5–4.5 eV [ 11 , 12 , 13 ], and 10 2 –10 16 Ω·cm [ 14 ], respectively. These films therefore have the potential to be used as semiconductor materials that offer widely variable optical and electrical properties.…”

Section: Introductionmentioning

confidence: 99%

“…Hydrogenated amorphous carbon began to attract attention as a semiconductor material after a -Si:H had already become the most commonly used amorphous semiconductor material [ 13 ]. As with a -Si:H, a -C:H can be synthesized over large areas and grown to have graded properties by controlling deposition conditions during the film growth.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, a -C:H films can be produced from relatively safer and lower-cost source materials such as hydrocarbon and graphite. Hence, a -C:H films are expected to be applied to devices such as solar cells and thin-film transistors (TFT) [ 13 ]. Fundamental research focused on the electrical conduction mechanism in a -C:H films was conducted by Fabisiak et al [ 25 ].…”

Section: Introductionmentioning

confidence: 99%

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Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures

et al. 2021

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Hydrogenated amorphous carbon (a-C:H) films have optical and electrical properties that vary widely depending on deposition conditions; however, the electrical conduction mechanism, which is dependent on the film structure, has not yet been fully revealed. To understand the relationship between the film structure and electrical conduction mechanism, three types of a-C:H films were prepared and their film structures and electrical properties were evaluated. The sp2/(sp2 + sp3) ratios were measured by a near-edge X-ray absorption fine structure technique. From the conductivity–temperature relationship, variable-range hopping (VRH) conduction was shown to be the dominant conduction mechanism at low temperatures, and the electrical conduction mechanism changed at a transition temperature from VRH conduction to thermally activated band conduction. On the basis of structural analyses, a model of the microstructure of a-C:H that consists of sp2 and sp3-bonded carbon clusters, hydrogen atoms and dangling bonds was built. Furthermore, it is explained how several electrical conduction parameters are affected by the carrier transportation path among the clusters.

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Stability of hydrogenated amorphous carbon thin films for application in electronic devices

Cited by 12 publications

References 43 publications

Impact of Plasma Pre-Treatment on the Tribological Properties of DLC Coatings on PDMS Substrates

Impact of Plasma Pre-Treatment on the Tribological Properties of DLC Coatings on PDMS Substrates

Influencia de la potencia de depósito en la morfología de películas delgadas de óxidos de molibdeno depositadas por el método de sputtering.

Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures

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