Stability of EUV multilayer coatings to low energy alpha particles bombardment

Nardello, Matteo; Zuppella, Paola; Polito, Vanessa; Corso, Alain Jody; Zuccon, Sara; Pelizzo, Maria Guglielmina

doi:10.1364/oe.21.028334

Cited by 28 publications

(13 citation statements)

References 12 publications

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“…The EUV 2nd order Bragg peak reflectivity decreases from 0.48 to 0.40 and from 0.6 to 0.58 respectively for sample CL1 and sample CL2. This is consistent with near normal reflectivity measurements performed at 30.4 nm and reported in [21] for same MLs. The relative changes in reflectivities due to irradiation are very different for the two samples: CL1 lose more intensity than CL2.…”

Section: Resultssupporting

confidence: 93%

Irradiation of low energy ions damage analysis on multilayers

et al. 2015

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Impacts of low energy He+ ions on reflectivity and stability of EUV multilayers is investigated in this work. Combination of X-ray reflectivity, grazing incidence EUV reflectivity near Silicon edge, and theoretical ion irradiation damage analysis can explain the degradation of ML performances. It is found that MLs irradiation of 4 keV helium ions degrades reflectivity performances with much more impact on grazing incidence mirrors. The proposed method can also regain changes in optical properties due to the irradiations of low energy ions

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Section: Resultssupporting

confidence: 93%

Irradiation of low energy ions damage analysis on multilayers

et al. 2015

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“…A particular case is instead that of multilayer (ML) stacks for the EUV. Several studies have demonstrated that protons and alpha particles with energy of a few keV can already lead to dramatic degradations of performance with fluences in the order of 10 16 ions/cm 2 [119][120][121]. For example, Mo/Si structures with different capping layers were irradiated by protons at 1 keV with fluences of 9•10 15 and 36•10 15 p/cm 2 , showing a change in the peak position and a degradation of the reflectance (Figure 4a).…”

Section: Charged Particlesmentioning

confidence: 99%

Mirrors for space telescopes: degradation issues

Garoli¹,

Marcos²,

Larruquert

et al. 2021

EUV and X-Ray Optics, Sources, and Instrumentation

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Mirrors are a subset of optical components essential for the success of current and future space missions. Most of the telescopes for space programs ranging from earth observation to astrophysics and covering the whole electromagnetic spectrum from x-rays to far-infrared are based on reflective optics. Mirrors operate in diverse and harsh environments that range from low-earth orbit to interplanetary orbits and deep space. The operational life of space observatories spans from minutes (sounding rockets) to decades (large observatories), and the performance of the mirrors within the mission lifetime is susceptible to degrading, resulting in a drop in the instrument throughput, which in turn affects the scientific return. Therefore, the knowledge of potential degradation mechanisms, how they affect mirror performance, and how to prevent them is of paramount importance to ensure the long-term success of space telescopes. In this review, we report an overview of current mirror technology for space missions with a focus on the importance of the degradation and radiation resistance of coating materials. Special attention is given to degradation effects on mirrors for far and extreme UV, as in these ranges the degradation is enhanced by the strong absorption of most contaminants.

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“…Such effect was attributed to the blistering, expansion and delamination and occurring in the topmost layers of the ML stack (see the TEM image reported in Figure 4b) [115][116] [117]. After He + ion irradiation with fluences of 2.5•10 15 ions/cm 2 , 5•10 15 ions/cm 2 10 16 ions/cm 2 the exposed MLs show a drop of reflectance but no appreciable reflectance peak shifts [109]. In this case, the degradation was attributed to an increase of the intermixing at the interfaces in the topmost layers.…”

Section: Charged Particlesmentioning

confidence: 99%

Mirrors for Space Telescopes: Degradation Issues

Garoli¹,

Marcos²,

Larruquert³

et al. 2020

Preprint

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Mirrors are a subset of optical components essential for the success of current and future space missions. Most of the telescopes for space programs ranging from Earth Observation to Astrophysics and covering the whole electromagnetic spectrum from X-rays to Far-Infrared are based on reflective optics. Mirrors operate in diverse and harsh environments that range from Low-Earth Orbit, to interplanetary orbits and the deep space. The operational life of space observatories spans from minutes (sounding rockets) to decades (large observatories), and the performance of the mirrors within the mission lifetime is susceptible to degrade, which results in a drop of the instrument throughput, which in turn affects the scientific return. Therefore, the knowledge of potential degradation mechanisms, how they affect mirror performance, and how to prevent them is of paramount importance to ensure the long-term success of space telescopes. In this review we report an overview on current mirror technology for space missions with a focus on the importance of degradation and radiation resistance of the coating materials. A special attention will be given to degradation effects on mirrors for the far and extreme UV as in these ranges the degradation is enhanced by the strong absorption of most contaminants.

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Stability of EUV multilayer coatings to low energy alpha particles bombardment

Cited by 28 publications

References 12 publications

Irradiation of low energy ions damage analysis on multilayers

Irradiation of low energy ions damage analysis on multilayers

Mirrors for space telescopes: degradation issues

Mirrors for Space Telescopes: Degradation Issues

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