Stability of carbon field emission current

Yamamoto, Shigehiko; Hosoki, Shigeyuki; Fukuhara, Satoru; Futamoto, Masaaki

doi:10.1016/0039-6028(79)90454-0

Cited by 41 publications

(21 citation statements)

References 3 publications

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“…4. 7 When ion hits an emitter surface, adsorbed gas molecules or atoms of the emitter can be moved and emission current changed as the result. The emitter was made of tungsten, which was electrochemically etched to form a sharp needle.…”

Section: Methodsmentioning

confidence: 99%

Experimental study of field emission characteristics as a function of the emitter to anode distance

Ashihara

Nakane

Adachi

1998

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Emission characteristics of Spindt-type platinum field emitters improved by operation in carbon monoxide ambient J.It was obtained experimentally that the fluctuation of the field emission current was increased as the anode was approached to the emitter, under a low level of the vacuum condition. It is numerically solved that the number of generated gas molecules and ions by electron stimulated desorption on the anode surface come to the emitter surface. Under ultrahigh vacuum, the number was not so different for the distance. On the other hand, under low level vacuum condition, the number was increased largely as the anode approached the emitter. So the fluctuation can be increased when the anode approaches the emitter under low level vacuum condition.

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Section: Methodsmentioning

confidence: 99%

Experimental study of field emission characteristics as a function of the emitter to anode distance

Ashihara

Nakane

Adachi

1998

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…21 Assuming the cusp is a cone of 5 m height and 2.5 m diameter, a tip radius of 2 nm is necessary to obtain the measured b. 14,24 However, in the higher current region, the ratio of noise decreases and becomes flicker type. In addition, the emission area is calculated as 5.6ϫ10 Ϫ11 cm 2 from the Fowler-Nordheim plot.…”

Section: Field Emission Experimentsmentioning

confidence: 99%

Fabrication of arrayed glassy carbon field emitters

Sohda

Tanenbaum

Turner

et al. 1997

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Low leakage current optically gated silicon field emitter arraysFabrication and electrical characterization of high aspect ratio silicon field emitter arrays Process development of gated field emitter arrays with dry etched amorphous silicon microtips on glass substrates J.Glassy carbon has desirable properties for electron field emission such as surface inertness, electrical conductivity, and thermal stability. In addition, a uniform thick substrate with a polished surface is easily obtainable. This enables one to apply large scale integrated circuit processing for fabricating arrayed tips. By using oxygen reactive ion etching, cusps over 3.5 m in height and 2.5 m in base diameter are fabricated with a tip radius of under 10 nm. The process is assisted by the formation of a layer of etch products which protects the newly forming tip from bending and over etching. The field emission current up to 50 A from the glassy carbon tips is obtained by applying high voltage to a mesh anode. The current which passed through the mesh anode is collected at another electrode and measured. The Fowler-Nordheim plot suggests the existence of nm scale structure on the tip. This favorable result indicates glassy carbon substrate is a good substrate for field emitter arrays.

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“…Along with the reduction of the deviation, the peak of the current distribution shifts to the lower current side with increasing cathode temperature. Both the reduction of the deviation and the lower peak shift of the current distribution can be interpreted qualitatively as the adsorption and desorption of atoms or ions on or off surface of the emission sites Yamamoto et al, 1979). Figure 5 illustrates the model in which the emission current fluctuation originates from the adsorption and desorption of atoms and/or ions.…”

Section: Emission Current Fluctuation and Stochastic Birth And Death mentioning

confidence: 99%