SSBW to PSAW conversion in SAW devices using heavy mechanical loading

Micro-machined ultrasonic transducers (MUT) appear as an attractive alternative to standard bulk transducers mainly based on PZT ceramic actuators. However, the simulation of these new devices requires one to take correctly into account their operating conditions. Particularly, most of the MUT structures are periodic, associating a very large number of elementary actuators excited in phase. Furthermore, the development of an equivalent to the Mason model for MUTs would help in the promotion of this new kind of transducers. In this work, we propose a very simple model based on the material resistance theory to describe the flexural motion of a MUT. It is associated with a periodic Green's function development to take into account radiation in water. Basic working principles of MUT then are deduced from computing results, which coincides with already published data on that topic.

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“…Separating the terms in x and in x leads to a simplification of the resulting equation system as shown in (16) (see next page).…”

Section: Boundary-radiation Conditionmentioning

confidence: 99%

“…The wave vector k can be advantageously replaced by 2πγ/p. If we define k as the product ω.s with s the slowness, then γ is equal to fps with f the frequency [16].…”

Section: Appendix a Definition Of Parameter γ And Harmonic And Mutualmentioning

confidence: 99%

Theoretical analysis of micro-machined ultrasonic transducer using a simple 1-D model

Ballandras¹,

Wilm

Gelly

2006

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…8,9 The FEM/boundary element method is widely used for obtaining the harmonic admittance 10 as well as the harmonic displacements under the electrodes of a periodic infinite array of electrodes on a piezoelectic substrate. 6,11,12 An alternative method is to use directly the FEM with appropriate periodic boundary conditions. 13 The difficulty in this case, however, is to account for the semi-infinite nature of the substrate, which can result in oversized meshes and then impractical calculations.…”

Section: Introductionmentioning

confidence: 99%

Energy storage and dispersion of surface acoustic waves trapped in a periodic array of mechanical resonators

Dühring

Laude

Khelif

2009

Journal of Applied Physics

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International audienceIt has been shown previously that surface acoustic waves can be efficiently trapped and slowed by steep ridges on a piezoelectric substrate, giving rise to two families of shear-horizontal and vertically polarized surface waves. The mechanisms of energy storage and dispersion are explored by using the finite element method to model surface acoustic waves generated by high aspect ratio electrodes. A periodic model is proposed including a perfectly matched layer to simulate radiation conditions away from the sources, from which the modal distributions are found. The ratio of the mechanical energy confined to the electrode as compared to the total mechanical energy is calculated and is found to be increasing for increasing aspect ratio and to tend to a definite limit for the two families of surface waves. This observation is in support of the interpretation that high aspect ratio electrodes act as resonators storing mechanical energy. These resonators are evanescently coupled by the surface. The dispersion diagram is presented and shows very low group velocities as the wave vector approaches the limit of the first Brillouin zone

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“…The importance of the singularities detection is that it gives us information about the presence of leaky and bulk waves [7], [XI. These latter have a great importance in certain application cited in literature [ 11, [2], [9].…”

Section: Discussionmentioning

confidence: 99%

Detection of bulk and leaky acoustic microwaves in piezoeleetyric crystal by wavelet technique

Benatia

Benslama

Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.

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In this paper, we propose a new approach for bulk and leaky detection of an acoustic microwave signal. For this reason, WO have used a wavelet transform as a numerical analysis method. The originality of this model consists of the local analysis signal singularities where abrupt events appear and hence access to hidden information by using the scale of this transform as up scaling parameters. These singularities inform us of presence of bulk and leaky waves.

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SSBW to PSAW conversion in SAW devices using heavy mechanical loading

Cited by 13 publications

References 9 publications

Theoretical analysis of micro-machined ultrasonic transducer using a simple 1-D model

Theoretical analysis of micro-machined ultrasonic transducer using a simple 1-D model

Energy storage and dispersion of surface acoustic waves trapped in a periodic array of mechanical resonators

Detection of bulk and leaky acoustic microwaves in piezoeleetyric crystal by wavelet technique

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