SQUID photoscanning: an imaging technique for NDE of semiconductor wafers and devices based on photomagnetic detection

Boyer, Jeffrey S.; Drung, D.; Schurig, T.

doi:10.1109/77.919555

Cited by 11 publications

(2 citation statements)

References 9 publications

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“…A group led by Schurig of PTB has demonstrated photomagnetic signal detection from a silicon wafer [2], and the first image of a silicon wafer magnetic field distribution [3], [4]. The group has also succeeded in the same experiment using a HTS-SQUID mounted on a cryocooler [5].…”

Section: Semiconductor Inspections By Laser Squid Microscopementioning

confidence: 99%

Examination of Relationship Between Resistivity and Photocurrent Induced Magnetic Field in Silicon Wafers Using Laser SQUID

Daibo

Kamiwano

2005

IEEE Trans. Appl. Supercond.

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Using the laser SQUID method, we examined the relationship between silicon wafer resistivity and magnetic field. By irradiating the wafer with a 3.2 W high-power laser beam, we were able to generate a measurable magnetic field perpendicular to the wafer, even for the wafers without p-n junctions. For samples having resistivities of 130 cm or less, we observed magnetic field distributions in the form of concentric circles. Histogram analysis showed that as resistivity decreases, mean value of magnetic field and standard deviation increase. For p-type wafers having resistivities of up to 300 cm, both mean value of magnetic field and standard deviation vary as a power law with respect to resistivity. However, for samples having resistivities of 300 cm or higher, the relationship was saturated, and determining resistivity was difficult. Since the laser SQUID method can be used to measure resistivity without electrical contact, it works well even for wafers with surface oxide films, and does not cause contamination.

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Section: Semiconductor Inspections By Laser Squid Microscopementioning

confidence: 99%

Examination of Relationship Between Resistivity and Photocurrent Induced Magnetic Field in Silicon Wafers Using Laser SQUID

Daibo

Kamiwano

2005

IEEE Trans. Appl. Supercond.

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“…Die Verfahren sind teilweise jedoch nicht rückwirkungsfrei, zu langsam oder zu unspezifi sch, so dass ein Bedarf an verbesserten prozessbegleitenden Charakterisierungsmethoden, insbesondere zur Erkennung von Rissen, besteht. Das 2001 [1] vorgestellte Messsystem zur berührungslosen Detektion von Fotostromverteilungen und Defekten in Solarzellen, basierend auf der SQUID-Photoscanning-Methode (Superconducting Quantum Interference Device -hochempfi ndlicher gekühlter Magnetfelddetektor) [2], liefert einen viel versprechenden Ansatz zur Lösung der Problemstellung.…”

Section: Problematikunclassified