Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications

Kaajakari, V.; Mattila, T.; Oja, Aarne; Kiihamäki, Jyrki; Seppä, Heikki

doi:10.1109/led.2004.824840

Cited by 163 publications

(92 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The motion of the structure is monitored through a motional sense current that results from the changes in the capacitance across the modulated transduction gaps. The mechanical resonant frequency of the SE mode of such structure of side length L can be approximately written as [9] …”

Section: Resonator Model and Designmentioning

confidence: 99%

See 1 more Smart Citation

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

Lee

Bahreyni

Zhu

et al. 2008

IEEE Electron Device Lett.

View full text Add to dashboard Cite

Abstract-A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.Index Terms-Allan deviation, bulk acoustic resonators, high quality factor, MEMS oscillator, single-crystal silicon (SCS).

show abstract

Section: Resonator Model and Designmentioning

confidence: 99%

“…This letter reports a 2.18-MHz square extensional (SE) mode [9] resonator with a measured Q of 1.16 million at 4 mtorr, which has been embedded in the feedback loop of a nonlinear circuit to realize a MEMS resonator-based oscillator. We have previously reported on devices with the same topology for applications in multiarrayed parallel mass detection [10].…”

mentioning

confidence: 99%

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

Lee

Bahreyni

Zhu

et al. 2008

IEEE Electron Device Lett.

View full text Add to dashboard Cite

show abstract

“…In particular, bulk mode resonators are widely studied due to their higher quality factor over the flexure modes, and the dimensions scales well with frequency. Previously reported electrostatically transduced square plate bulk modes include the square-extensional (SE) mode [1][2][3] and the Lamé mode [2][3][4]. Another type of bulk mode that exists in the square plate is the face shear mode, which has been reported in quartz crystals [5], but has not yet studied in single crystal silicon.…”

Section: Introductionmentioning

confidence: 99%

Electrostatically transduced face-shear mode silicon MEMS microresonator

Lin

Yan

Seshia

2010

2010 IEEE International Frequency Control Symposium

View full text Add to dashboard Cite

“…The vibration of the square-extensional (se) resonator ( Figure 3(a)) is characterized as plate expanding and contracting in-plane while preserving the square shape [8], [9]. The side length of the resonator corresponds to the half acoustic wavelength.…”

Section: Studied Resonatorsmentioning

confidence: 99%

“…Unfortunately, the power handling capacity of clamped-clamped resonators limit the achievable phase noise [6], [7]. Orders-of-magnitude larger power handling capacity has been obtained with a bulk acoustic mode (BAW) silicon resonators leading to noise floor of -150 dBc/Hz at 13 MHz meeting the typical phase noise requirements for wireless communication [8], [9]. Recently, comparable noise performance has been obtained with a polycrystalline silicon disk resonator and integrated electronics [10].…”

Section: Introductionmentioning

confidence: 99%