1986
DOI: 10.1016/s0168-583x(86)80078-7
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Sputtering yield of Cu and Ag at target temperatures close to the melting point

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Cited by 20 publications
(10 citation statements)
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“…This has been demonstrated and interpreted in Monte-Carlo simulations for different kinds of graphite materials [273] and beryllium [274]. Physical sputtering does not depend on surface temperature [275].…”
Section: Review: Plasma-materials Interactionsmentioning
confidence: 71%
“…This has been demonstrated and interpreted in Monte-Carlo simulations for different kinds of graphite materials [273] and beryllium [274]. Physical sputtering does not depend on surface temperature [275].…”
Section: Review: Plasma-materials Interactionsmentioning
confidence: 71%
“…Theoretical studies [45][46][47] have predicted and experimental results [48][49][50] have confirmed an increase of the sputtering yield with increasing target temperature. Especially, for temperatures near the melting temperature or like here near the decomposition temperature of the sputtered material, a strong rise of the sputtering yield can be expected.…”
Section: Resultsmentioning
confidence: 80%
“…Physical sputtering of pure elements at relatively low temperature is well understood and can be simulated with computer codes. 29 However, recent investigations on metals such as lithium and gallium show an increase of the erosion rates, and a dependence of the yield on the incidence flux, for a broad range of temperatures near the melting point. For beryllium, tungsten, and carbon, experimental data and the fit for the sputtering yield at normal incidence are shown in Fig.…”
Section: Via Microscopic Erosionmentioning
confidence: 99%