1991
DOI: 10.1016/0022-3115(91)90083-j
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Sputtering of tungsten by oxygen at temperatures up to 1900 K

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Cited by 15 publications
(15 citation statements)
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“…The sputtering yields for these oxidised W targets were very small, %2 · 10 À4 W/D þ , but significantly higher than observed without the addition of O 2 . Above the threshold energy, the addition of O 2 appeared to reduce the sputtering yield, which is similar to the results of Hechtl et al [2,3] for O þ sputtering of W.…”
Section: Introductionsupporting
confidence: 85%
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“…The sputtering yields for these oxidised W targets were very small, %2 · 10 À4 W/D þ , but significantly higher than observed without the addition of O 2 . Above the threshold energy, the addition of O 2 appeared to reduce the sputtering yield, which is similar to the results of Hechtl et al [2,3] for O þ sputtering of W.…”
Section: Introductionsupporting
confidence: 85%
“…These experiments were performed in three different accelerator systems, and produced sputtering yields that varied by as much as an order of magnitude, apparently due to variations in the surface composition. The results from experiments with tungsten at 1900 K were in good agreement with their TRIM.SP calculations [3] for physical sputtering of a clean W surface by O þ . At lower temperatures, the calculations were made to match the data by increasing the oxygen content of the surface.…”
Section: Introductionsupporting
confidence: 82%
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“…However, the enhanced erosion due to WO 3 appears to be a small effect that could not be observed during oxygen ion sputtering even at temperatures of up to 1900 K [312]. Sputtering by hydrogen isotopes near the sputtering threshold energy results in such small yield values, that the additional release of oxide molecules during simultaneous impact of hydrogen and oxygen can be observed [313].…”
Section: Chemical Erosion Due To Oxygenmentioning
confidence: 99%