2009
DOI: 10.1039/b814729a
|View full text |Cite
|
Sign up to set email alerts
|

Sputter-induced chemical transformation in oxoanions by combination of C60+ and Ar+ ion beams analyzed with X-ray photoelectron spectrometry

Abstract: The change of the chemical states of inorganic oxoanion salts by low-energy single atomic projectiles (0.5 kV Ar(+)), high-energy cluster ion beams (10 kV C(60)(+)), and mixed 0.2 kV Ar(+) and 10 kV C(60)(+) are presented. Although the sputtering conditions of C(60)(+) and C(60)(+)-Ar(+) mixed sputtering used in this work provide more accurate results for profiling organic films than Ar(+) sputtering, the difference in profiling inorganic materials is not as dramatic. For inert oxoanions like carbonate and pho… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
29
0

Year Published

2011
2011
2024
2024

Publication Types

Select...
7
1

Relationship

1
7

Authors

Journals

citations
Cited by 45 publications
(30 citation statements)
references
References 25 publications
(21 reference statements)
1
29
0
Order By: Relevance
“…(a) and (c)) revealed the crater depths to be 490 and 600 nm (equivalent sputtering rate of 1.58 × 10 –27 and 1.94 × 10 –27 m 3 /ion) after sputtered with the single C 60 + beam and co‐sputtering, respectively. It has been reported that C 60 + ion sputtering can significantly roughen the surface, masking the benefit of a shallower damage layer, and limiting the depth resolution. Using an atomic force microscope (Figs.…”
Section: Resultsmentioning
confidence: 99%
“…(a) and (c)) revealed the crater depths to be 490 and 600 nm (equivalent sputtering rate of 1.58 × 10 –27 and 1.94 × 10 –27 m 3 /ion) after sputtered with the single C 60 + beam and co‐sputtering, respectively. It has been reported that C 60 + ion sputtering can significantly roughen the surface, masking the benefit of a shallower damage layer, and limiting the depth resolution. Using an atomic force microscope (Figs.…”
Section: Resultsmentioning
confidence: 99%
“…An energy shift (by a few eV) caused by instrument‐dependent dispersion differences (per pixel) and onset‐energy definitions are also considered. The XPS‐P 2p 3/2 data [ 26,28–44 ] from phosphates, phosphites, oxides, halides, phosphides, etc. are summarized in Table S2, Supporting Information.…”
Section: Methodsmentioning
confidence: 99%
“…The proximity of the P K edge onset to the P 0 standard suggests that P is weakly charged in the phosphide. In order to quantify the P valence state, we analyzed X‐ray photoelectron spectroscopy (XPS) data for a wide range of P‐containing compounds, [ 26,28–44 ] including phosphates, phosphites, and phosphides (see Table S2, Supporting Information). We find that the P‐2p 3/2 binding energy ( E B ) and the P valence (δ P ) form a bowknot‐shaped chart with the node locating at the position of the P 0 standards (Figure 2d).…”
Section: Figurementioning
confidence: 99%
“…Motivated by the analysis of the nature of the SEI (Supplementary Tables 5 and 6) [26][27][28][29][30][31][32][33][34] , the NaOTf-DEGDME combination was selected as a launching point for further formulation of electrolytes that can operate below −40°C. A different solvent, DOL, which is a cyclic ether with a low melting point of −95°C, was introduced into DEGDME to produce binary-solvent electrolytes (Fig.…”
Section: Design Of Binary-solvent Electrolytes For Extreme Low Tempermentioning
confidence: 99%