Sputter deposition of thermochromic VO2 films on In2O3:Sn, SnO2, and glass: Structure and composition versus oxygen partial pressure

Abstract

Articles you may be interested inThermochromic VO2 nanorods made by sputter deposition: Growth conditions and optical modeling J. Appl. Phys. 114, 033516 (2013); 10.1063/1.4813876 Effect of O2 gas partial pressure on mechanical properties of Al2O3 films deposited by inductively coupled plasma-assisted radio frequency magnetron sputtering J. Vac. Sci. Technol. A 30, 051511 (2012); 10.1116/1.4746013Correlation of temperature response and structure of annealed V O x thin films for IR detector applications Thermochromic thin films of VO 2 were produced by reactive DC magnetron sputtering and were characterized by atomic force microscopy, scanning electron microscopy, x-ray diffraction, spectrophotometry, and resistance measurements. Depositions took place onto substrates of glass with and without layers of electrically conducting ITO (i.e., In 2 O 3 :Sn) and nonconducting SnO 2 . The substrate conditions were of large importance; thus, VO 2 could be prepared on ITO within a significantly wider process window of oxygen partial pressure than for the other substrates and could yield highly granular deposits. VO 2 films on ITO typically showed some lattice compression. Our results are valuable for the preparation and implementation of thermochromic glazings, which are of importance for energy efficient buildings.

Hydrothermal Synthesis of VO2 Polymorphs: Advantages, Challenges and Prospects for the Application of Energy Efficient Smart Windows

“…Various TCE materials, such as Ag nanowires, carbon nanotube, Al‐doped ZnO, ITO/FTO and graphene are incorporated with VO 2 to activate its thermochromic performance. Specially, as shown in Figure a–d, the electrothermochromic device combining VO 2 nanoparticles with ultra‐long Ag nanowires can regulate the infrared transmittance dynamically as the input voltage and action time change.…”

The effect of thermochromic coatings of VO2 on the fire performance of windows

“…Uncoated BK7 windows were used as control specimens. Further details regarding the structure of the coating and the application procedure can be found elsewhere …”

“…Further details regarding the structure of the coating and the application procedure can be found elsewhere. 9 The tests were performed in a modified version of the cone calorimeter apparatus. The apparatus is normally employed to assess the reaction to fire of materials and products, while examining the time required for them to ignite under controlled conditions of radiant heat exposure.…”

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

“…We focus on sputtering since this technique has excellent scalability and is commonly employed for glazing applictions. The substrate material can have a significant influence on the growth of sputter-deposited particles [73], and glass precoated with electrically conducting In2O3:Sn (indium-tin oxide, ITO) gave The substrate material can have a significant influence on the growth of sputter-deposited particles [73], and glass precoated with electrically conducting In 2 O 3 :Sn (indium-tin oxide, ITO) gave more well-defined particles than in the case of analogous deposition onto bare glass or glass precoated with non-conducting SnO 2 . The reason for the influence of the substrate is not known in detail, but surface energy and the fact that an electrically conducting substrate avoids charge-induced repulsion between adjacent particles are expected to play a role.…”