Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

Huasong, 刘华松 Liu; Xiao, 杨 霄 Yang; Dandan, 刘丹丹 Liu; Chenghui, 姜承慧 Jiang; Shi-Da, 李士达 Li; Yiqin, 季一勤 Ji; Feng, 张锋 Zhang; Lishuan, 王利栓 Wang; Yugang, 姜玉刚 Jiang; Deying, 陈德应 Chen

doi:10.3788/aos201737.1031001

光学学报

2017

DOI: 10.3788/aos201737.1031001

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Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

刘华松 Liu Huasong¹,

杨霄 Yang Xiao²,

刘丹丹 Liu Dandan³

et al.

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Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

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