Splicing Detection Technique of Homogeneity of Large-Aperture Laser Neodymium Glass

Yunbo, 白云波 Bai; You, 周游 Zhou; Shijie, 刘世杰 Liu; Jianda, 邵建达 Shao; Longbo, 徐隆波 Xu

doi:10.3788/aos201838.0912004

Cited by 2 publications

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“…Using the sub-aperture stitching technique [2] , the reflected surface form or transmitted wavefront of an optical element can be measured using an interferometer with a measurement aperture smaller than the aperture of the element to be measured. To date, we have realized stitching measurements of large-aperture optical elements with dimensions of 810 ×460 × 40 mm [3] . However, concerning the surface form measurement of larger-aperture optical elements, realizing high precision measurements of the reflected surface form of meter-scale optical flats is difficult because of the increase in stitching and influence of the interferometer system error.…”

Section: Introductionmentioning

confidence: 99%

High-precision surface form measurement of meter-scale optical flat

Bai

Qiao

Sun

et al. 2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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Optical flats used to realize pulse compression grating in ultra-intense and ultra-fast laser systems are large and have stringent face form requirements. This study employed an interferometer with an optical aperture of Φ800 mm to meet the demand for high-precision surface form measurements of meter-scale optical flats. The measurement accuracy of this interferometer improved using absolute surface form measurement. In addition, the full-aperture reflection surface form measurement of meter-scale optical flats was realized by exploiting sub-aperture stitching technology. The absolute measurement principle, based on the combination of rotational averaging and parity function, was used to calibrate the system error of the interferometer for absolute surface form measurement. The absolute surface form peak-to-valley (PV) repeatability (2σ) of the calibrated interferometer system error was 1.96 nm, and the root mean square (RMS) repeatability (2σ) was 0.44 nm. The calibration results show that the absolute surface-form measurement technique can effectively remove the interferometer system error and improve the surface-form measurement accuracy of the optical flat. The calibrated interferometer was then used to perform a two-dimensional stitching inspection of the meter-scale optical flat. The repeatability (2σ) of the PV value was 21.52 nm, whereas the repeatability (2σ) of the RMS value was 4.43 nm for a 1,680 × 1,100 × 200 mm flat. The measurement results show that the high-precision surface form measurement of meterscale optical flats was realized.

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Section: Introductionmentioning

confidence: 99%