Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Park, Chan Woo; Kim, Tae Gun; Kim, Min Woo; Aldalbahi, Ali; El‐Newehy, Mohamed H.; Yoon, Sam S.

doi:10.1007/s12650-019-00620-2

Cited by 4 publications

(1 citation statement)

References 25 publications

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“…The thermal performance of the heat exchanger can be improved by using metal foam inserts with a high surface area to volume ratio (790-2740 m 2 /m 3 ) and high porosity (>90%). Several groups have published experimental research on metal foam heat exchangers [1][2][3][4][5][6], and, to date, many studies have been conducted on the convective heat transfer of single-phase liquids or gases using small heat exchangers and metal foams [7][8][9][10][11][12][13][14][15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Effect of Metal Foam Insert Configurations on Flow Boiling Heat Transfer and Pressure Drop in a Rectangular Channel

Nam

Kim

et al. 2021

Materials

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Heat transfer under flow boiling is better in a rectangular channel filled with open-cell metal foam than in an empty channel, but the high pressure drop is a drawback of the empty channel method. In this study, various types of metal foam insert configurations were tested to reduce the pressure drop while maintaining high heat transfer. Specifically, we measured the boiling heat transfer and pressure drop of a two-phase vertical upward flow of R245fa inside a channel. To measure the pressure and temperature differences of the metal foam, differential pressure transducers and T-type thermocouples were used at both ends of the test section. While the saturation pressure was kept constant at 5.9 bar, the steam quality at the inlet of the test section was changed from 0.05 to 0.99. The channel height, moreover, was 3 mm, and the mass flux ranged from 133 to 300 kg/m2s. The two-phase flow characteristics were observed through a high-speed visualization experiment. Heat transfer tended to increase with the mean vapor quality, and, as expected, the fully filled metal foam channel offered the highest thermal performance. The streamwise insert pattern model had the lowest heat transfer at a low mass flux. However, at a higher mass flux, the three different insert models presented almost the same heat transfer coefficients. We found that the streamwise pattern model had a very low pressure drop compared to that of the spanwise pattern models. The goodness factors of the flow area and the core volume of the streamwise patterned model were higher than those of the full-filled metal foam channel.

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