Liquid Film Coating 1997
DOI: 10.1007/978-94-011-5342-3_20
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Spin Coating

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Cited by 50 publications
(37 citation statements)
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“…Spin coating is a well-established technology which in the past has been used in the manufacture of photoresists and oxide coatings for screens (Emslie et al, 1958;Hall et al, 1998). There is a substantial scientific literature on the spin-coating process and useful reviews on the subject are given by Scriven (1988) and Larson and Rehg (1997). Of particular relevance to this paper is the work of Emslie et al (1958) who established how a Newtonian fluid thins under the action of a centrifugal rotation on a flat disc.…”
Section: Introductionmentioning
confidence: 97%
“…Spin coating is a well-established technology which in the past has been used in the manufacture of photoresists and oxide coatings for screens (Emslie et al, 1958;Hall et al, 1998). There is a substantial scientific literature on the spin-coating process and useful reviews on the subject are given by Scriven (1988) and Larson and Rehg (1997). Of particular relevance to this paper is the work of Emslie et al (1958) who established how a Newtonian fluid thins under the action of a centrifugal rotation on a flat disc.…”
Section: Introductionmentioning
confidence: 97%
“…In such techniques, a substrate is coated with a layer of liquid containing suspended or solvated particles, and the carrier fluid is evaporated leaving behind a solid residue. Both dip and spin coating are well-established industrial techniques for doing this, generating uniform films with thicknesses varying from nanometers to microns [29]. The difference between these two processes is that in spin coating the substrate is rotated quickly as the liquid with suspended/solvated particles is placed onto the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…The evolution of partially wetting thin liquid films on solid substrates and the subsequent pattern formation are a subject of growing importance. This type of flow is of widespread relevance in a variety of technological applications, ranging from various types of coatings [1][2][3] to new applications in micro-and nanofluidics. 4,5 These films are often unstable and could break up, leading to the formation of dry spots that are often undesirable.…”
Section: Introductionmentioning
confidence: 99%