2020
DOI: 10.1007/s12541-019-00304-9
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Spherical Mirror and Surface Patterning on Silicon Carbide (SiC) by Material Removal Rate Enhancement Using CO2 Laser Assisted Polishing

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Cited by 13 publications
(1 citation statement)
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“…Li et al 9 used magnetorheological technology to polish the 2m-diameter aspheric SiC mirror, and the surface roughness of the workpiece was reduced from λ/10 RMS to λ/50 RMS, but the polishing efficiency was low. Serrano et al 10 used CO 2 laser-assisted free abrasive polishing to polish SiC mirrors, which improved the polishing efficiency by 43% compared to the conventional polishing method but is currently available only for flat mirrors.…”
Section: Introductionmentioning
confidence: 99%
“…Li et al 9 used magnetorheological technology to polish the 2m-diameter aspheric SiC mirror, and the surface roughness of the workpiece was reduced from λ/10 RMS to λ/50 RMS, but the polishing efficiency was low. Serrano et al 10 used CO 2 laser-assisted free abrasive polishing to polish SiC mirrors, which improved the polishing efficiency by 43% compared to the conventional polishing method but is currently available only for flat mirrors.…”
Section: Introductionmentioning
confidence: 99%