“…To make the BTE tractable we apply a spherical harmonic expansion method which, for 2D steady state device simulation, transforms it into a three-dimensional partial differential/difference equation. In previous work we have shown that the Spherical Harmonic Boltzmann method can provide the distribution function for an entire 2D MOSFET, and obtain agreement for current-voltage characteristics, as well as substrate current for a single device [4,10]. We have also shown that the method agrees with Monte Carlo simulations while being very efficient from a computational point of view.…”