Spectroscopic study of interfaces in Al/Ni periodic multilayers

Abstract

Using electron-induced x-ray emission spectroscopy (XES), we have studied two Al/Ni periodic multilayers that differ only by their annealing temperature: as-deposited and annealed at

Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

“…We have performed XES with a high-resolution wavelength dispersive spectrometer [17] to identify the chemical state of the Mg atoms within the multilayers. Similar studies have already been performed by this method [18][19][20][21][22][23][24][25][26]. We observed the shape of the Mg Kβ emission band from the 3p-1s transition which describes the Mg 3p valence states.…”

Production of intermetallic compounds from Ti/Al and Ni/Al multilayer thin films—A comparative study

“…ers occurs sequentially and not simultaneously [5][6][7]. Furthermore, phase formation sequence in these multilayers depends on their average chemical composition, modulation period and processing history [7,[8][9][10][11][12]. The influence of the modulation period has been definitely proven in a recently published detailed kinetic study [13].…”

TEM Characterization of As-Deposited and Annealed Ni/Al Multilayer Thin Film

“…The structural evolution, and the amount of released heat, is known to depend on processing pathways and/or nominal composition (Michaelsen et al, 1996); interdiffusion or intermixing prior to phase transformation plays a key role in determining the phase formation kinetics (Gavens et al, 2000). Some studies of these reactions were made with powders (Miura et al, 2000; Zhu & Abbaschian, 2003); however, reactive multilayer thin films are now more studied (Qiu & Wang, 2007; Salou et al, 2008; Simões et al, 2008; Le Guen et al, 2009). Actually, when compared with reactive multilayer thin films, the powders exhibit some disadvantages that make them less appealing: the large surface area of the particles is prone to oxidation, poor contact between particles results in slower reaction velocity and lower heat release, and the interface region exhibits porosity (Zhu & Abbaschian, 2003).…”

“…Some studies of these reactions were made with powders Miura et al, 2000;Zhu & Abbaschian, 2003! ; however, reactive multilayer thin films are now more studied~Qiu & Wang, 2007;Salou et al, 2008;Simões et al, 2008;Le Guen et al, 2009!. Actually, when compared with reactive multilayer thin films, the powders exhibit some disadvantages that make them less appealing: the large surface area of the particles is prone to oxidation, poor contact between particles results in slower reaction velocity and lower heat release, and the interface region exhibits porosity~Zhu & Abbaschian, 2003!.…”