2010
DOI: 10.1016/j.vacuum.2010.05.011
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Spectroscopic study of an electrode microwave discharge in argon and argon–hydrogen mixtures

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Cited by 8 publications
(11 citation statements)
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“…This result is in agreement with the inequality T g < T rot < T vib often met for non-equilibrium plasmas [29] and is higher than Ar atom excitation temperature T exc (≈3,050 K) measured from Ar MIP at 3 mbar. [41] The T rot results for pure Ar, Ar/C 2 H 2 , H 2 + 20% C 2 H 2 , and He+20% C 2 H 2 mixtures listed in Table 1 depict the insignificant change in temperatures with the percentage of C 2 H 2 . This is also the case with c /N and P/N values, which slightly vary for the studied C 2 H 2 range, see Figure 4b.…”
Section: The T Rot and T Vib Resultsmentioning
confidence: 99%
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“…This result is in agreement with the inequality T g < T rot < T vib often met for non-equilibrium plasmas [29] and is higher than Ar atom excitation temperature T exc (≈3,050 K) measured from Ar MIP at 3 mbar. [41] The T rot results for pure Ar, Ar/C 2 H 2 , H 2 + 20% C 2 H 2 , and He+20% C 2 H 2 mixtures listed in Table 1 depict the insignificant change in temperatures with the percentage of C 2 H 2 . This is also the case with c /N and P/N values, which slightly vary for the studied C 2 H 2 range, see Figure 4b.…”
Section: The T Rot and T Vib Resultsmentioning
confidence: 99%
“…Another possibility is that two-temperature distribution originates from the existence of different population mechanisms (the contribution of metastable atoms). [41] The T rot results for pure Ar, Ar/C 2 H 2 , H 2 + 20% C 2 H 2 , and He+20% C 2 H 2 mixtures listed in Table 1 depict the insignificant change in temperatures with the percentage of C 2 H 2 . For Ar/C 2 H 2 MIP, under our experimental conditions, T vib ∼ 6,000 K is obtained.…”
Section: Figure 11mentioning
confidence: 99%
“…3, but in average 10% smaller absolute values [3]. 3, but in average 10% smaller absolute values [3].…”
Section: H'2^h{ls)+h{nl) + Ej^mentioning
confidence: 88%
“…The influence of cathode material is not fully evident from Table 1, but it comes as a consequence of reflection coefficients of fast hydrogen ions and atoms from cathode material and the best illustration is TEDB value for aluminum and copper HC [36]. Small values of TEDB determined in water vapour are related to the formation of oxide layers at HC surface, which decrease reflection coefficients of cathode material [3]. 4.…”
Section: Influence Of Cathode Materials and Working Gas On Edbmentioning
confidence: 99%
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