“…1 Because it offers a wide, direct band gap, high carrier mobility, and high reliability, [2][3][4] it is widely used in infrared detectors, [5][6][7] solar cells, 8 and transistors. [9][10][11] In recent years, III-V compound films have often been produced using epitaxial growth, 12,13 with techniques such as metalorganic chemical vapor deposition (MOCVD or MOVPE) [14][15][16][17] and molecular beam epitaxy (MBE). [18][19][20] However, for these methods, the lattice mismatch between the In x Ga 1x As thin film and the substrate is the most important problem to be solved.…”