Spectroscopic investigations of gas-phase chemistry during laser-induced photolytic CVD of W

Mogyorósi, P.; Carlsson, Jan‐Otto; Moradi, Mona

doi:10.1016/0169-4332(92)90015-p

Cited by 13 publications

(3 citation statements)

References 4 publications

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“…Recent studies have shown that luminescence is observed when metal-containing molecules are irradiated under photochemically driven chemical vapor deposition (CVD) conditions and that luminescence spectroscopy can be used to identify photofragments and assist in the elucidation of the photolytic deposition pathways. − Laser-assisted metal organic CVD relies on the use of volatile organometallic compounds to deliver material to a substrate where the compound is photodecomposed leaving behind the material to be deposited (and possibly undesired contaminants). − Laser-assisted CVD has the advantages of spatially selective deposition on the substrate, selective energy transfer to the deposition precursor, and low processing temperature. − Efforts to fabricate multilayer structures with well-defined physical properties and abrupt interfaces benefit from the low growth temperatures. − …”

Section: Introductionmentioning

confidence: 99%

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

1998

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The luminescence that is observed under gas phase photolytic deposition conditions is studied for Cr(hfac)3, Ni(hfac)2, and Pt(hfac)2. This luminescence is analyzed under a variety of conditions, including the relatively high pressures of an evacuated gas cell and the collision-free conditions of a molecular beam. The effects of inert buffer gas are also studied. Features in these spectra indicate that, in general, multiple photolysis processes occur. Some simple fragments that are produced from these compounds are identified, including bare metal atoms (Ni, Cr), metal monofluorides (NiF, CrF), CH (in the case of Ni(hfac)2), and metal carbide from Pt(hfac)2. It is postulated that the difference in the observed photofragmentation pathway in the case of platinum is due to σ bonding to the β carbon of the hfac moiety as opposed to the bidentate bonding of the other two metals. Possible mechanisms are presented. Detailed analysis of the spectra allows characterization of the internal energy of the platinum carbide photofragment.

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Section: Introductionmentioning

confidence: 99%

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

1998

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“…Both gas phase and surface reactions can cause deposition. Our interest in this area was sparked by CVD precursor molecules (or fragments) that exhibit luminescence under the conditions of laser-assisted CVD. , It is our aim to gain an understanding of the photodeposition process by examining this luminescence. One issue we investigate is that of surfaces versus gas phase components of the CVD process.…”

Section: Introductionmentioning

confidence: 99%

Copper Fluoride Luminescence during UV Photofragmentation of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II) in the Gas Phase

Talaga

Zink

1996

Inorg. Chem.

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Gas phase 308 and 350-370 nm photolysis of bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II), Cu(hfac)(2), produces CuF as well as copper atoms and dimers. These metal-containing fragments, identified by luminescence spectroscopy, are studied under a variety of gas phase conditions ranging from 1 bar in a static chamber to 10(-4) mbar in a collision-free molecular beam. Copper atom and dimer luminescence is observed at the higher pressures, whereas at low pressures (total pressure no greater than the vapor pressure of the sample) exclusively CuF emission is observed. The a, A (omega = 0, 1, 2), B, and C excited states at 681.0, 567.6, and 505.1, and 491.7 nm are observed. The (3)Pi(0)(-) component of the A state is observed for the first time. The CuF luminescence obeys a quadratic power law with 308 nm excitation. The partitioning of excess energy into fragment degrees of freedom is determined from the intensities of the emission lines. The vibrational and rotational temperatures of the CuF fragment are in excess of 1700 K. Mechanisms of CuF formation, comparisons with the free ligand and with other volatile copper complexes, and the implications for laser-assisted chemical vapor deposition are discussed.

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“…The second part can be explained by quenching. A hydrogen quenching effect was already reported for the atomic lines of W in similar gas mixtures [4].…”

Section: Wavelength [Nm]mentioning

confidence: 82%

Origin of the Laser-Induced Broad Band Luminescence from a WF₆/H₂/Ar Gas Mixture

1991

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Spectroscopic investigations of gas-phase chemistry during laser-induced photolytic CVD of W

Cited by 13 publications

References 4 publications

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

Copper Fluoride Luminescence during UV Photofragmentation of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II) in the Gas Phase

Origin of the Laser-Induced Broad Band Luminescence from a WF₆/H₂/Ar Gas Mixture

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Spectroscopic investigations of gas-phase chemistry during laser-induced photolytic CVD of W

Cited by 13 publications

References 4 publications

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

Luminescent Photofragments of (1,1,1,5,5,5-Hexafluoro-2,4-pentanedionato) Metal Complexes in the Gas Phase

Copper Fluoride Luminescence during UV Photofragmentation of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II) in the Gas Phase

Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

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Origin of the Laser-Induced Broad Band Luminescence from a WF₆/H₂/Ar Gas Mixture