Using a suitable lift-off technique, we have investigated the chemical properties of the interface between Mo and chalcopyrite compound semiconductors by x-ray photoelectron spectroscopy and x-ray excited Augerelectron spectroscopy. By a systematic comparison of interfaces between S-free ͓Cu͑In, Ga͒Se 2 ͑CIGSe͔͒ as well as S-containing ͓Cu͑In, Ga͒͑S,Se͒ 2 ͑CIGSSe͔͒ chalcopyrites and Mo, we find that the chemical structure at the CIG͑S͒Se/Mo interface is strongly influenced by the presence or absence of S. We observe an interfacial MoSe 2 ͓Mo͑S Z Se 1−Z ͒ 2 ͔ layer formed between CIGSe ͓CIGSSe͔ and the Mo layer. The Mo͑S Z Se 1−Z ͒ 2 layer appears significantly thinner than the MoSe 2 layer and exhibits a different S / ͑S+Se͒ ratio ͓Z = 0.9͑1͔͒ than the CIGSSe back side ͓0.5͑7͔͒, giving insight into the "competition" between S and Se during contact formation. Furthermore, we find a significant Ga accumulation at the Mo back contact, which points to pronounced chemical interactions during the formation of the CIG͑S͒Se/Mo interface.