Spectroscopic ellipsometry study of transparent conductive ZnO layers for CIGS solar cell applications

Németh, Attila; Major, Cs.; Fried, M.; Lábadi, Z.; Bársony, I.

doi:10.1016/j.tsf.2007.12.012

Cited by 24 publications

(14 citation statements)

References 18 publications

(14 reference statements)

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“…This result indicates that ZnO films on sapphire were more reduced than those on glass. 24 In particular, the lower transmittance level in the visible wavelength region suggests the presence of Zn i s not terminated with oxygen atoms.…”

Section: -3 Houseimentioning

confidence: 99%

Contrasting transparent conductive properties of ZnO films on amorphous and crystalline substrates in view of thickness dependence

Akazawa

2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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The authors conducted comparative studies on ZnO films deposited on various substrates to elucidate how the different nucleation and crystallization processes affect their transparent conductive properties. The resistivity versus thickness curves of Ga-doped ZnO films deposited on a-SiNx:H films and glass substrates coincided within the experimental error. This result means that as long as the amorphous substrate is neither reactive with the deposited film nor providing crystalline seeds, resistivity is determined only by self-crystallization. In contrast, the resistivity of undoped ZnO films on sapphire c-planes was about half that on glass substrate even when the films were deposited at room temperature, indicating that the crystal template of sapphire stimulates local crystallization of ZnO films, though they are not epitaxial. With regard to the dependence on deposition temperature, a sudden drop in carrier concentration of undoped ZnO films was commonly observed between 200 and 300 °C for both glass and sapphire substrates, as a result of eliminating crystal disorder that facilitates holding donors. A significant difference was manifested between 300 and 500 °C; ZnO films on glass were nearly insulating, whereas those on sapphire were conductive, reflecting higher mobility and more reduced state. On sapphire substrates, the resistivity and sheet resistance versus thickness curves exhibited a monotonic decrease below 200 °C, whereas a plateau region appeared between 20 and 100 nm at 300 and 400 °C. This corresponds to the existence of electrically dead or inactive region near the interface probably because of depletion of carriers in the lattice-matched epitaxial layer. ZnO films became well conductive only when they were sufficiently thick.

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Section: -3 Houseimentioning

confidence: 99%

Contrasting transparent conductive properties of ZnO films on amorphous and crystalline substrates in view of thickness dependence

Akazawa

2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…The conductive matters are categorized mainly into two: transparent metal oxides and metals. In the case of metal oxides, indium tin oxide (ITO) [3], zinc oxide (ZnO) [4], and titanium oxide (TiO 2 ) [5] are familiar. The transparent conductive layer is deposited or coated onto transparent inorganic and polymer substrates.…”

Section: Introductionmentioning

confidence: 99%

Semitransparent Conductive Thin Porous Au Films on a Thiol-containing Primer Layer formed from Au Nanoparticle Ink

Nagase

Kawashima

Nakagawa

2010

J. Photopol. Sci. Technol.

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We demonstrated that thin porous Au films showing semi-transparency in the region of visible light and electric conductivity were prepared by spincoating an -terpineol ink containing decanethiol-passivated Au nanoparticles onto silica and silicon substrates modified with 3-mercaptopropyltriethoxysilane and subsequent annealing for sintering the Au nanoparticles. A thin film of the -terpineol ink was transformed to droplets on unmodified silica and silicon substrates by dewetting after spincoating, while it was changed to a thin porous film on the modified substrates by suppressing a progress of dewetting. The porous structure remained after sintering at 300 o C, resulting in the formation of semitransparent and conductive thin porous Au films with a transmittance of about 40 % in the visible light region and a surface resistivity of 10 -2 -10 -3 /square. We also demonstrated that the thin porous Au film was available as a wet etching mask for silicon microprocessing using a hydrogen fluoride (HF) aqueous solution.

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“…The optical constants are very important to designing the optical devises, because of their relation to the electronic polarize-ability of ions and the local field inside materials [12]. Thus it's important to determine the refractive index (n) and extinction coefficient (k) of the films.…”

Section: Spectroscopy Ellipsometrymentioning

confidence: 99%

Spectroscopic ellipsometry, optical, structural and electrical investigation of sprayed pure and Sn-doped ZnO thin films

Mokhtari

Benhaliliba

Aida

et al. 2013

EPJ Web of Conferences

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in this work, we report the transparent pure and Sn-doped zinc oxide (ZnO). The films were deposited onto microscope glass substrate which was heated at 350±5C° by ultrasonic spray pyrolysis (U S P) deposition technique. The concentrations of Sn were selected within the range of 0-3% by step of 0.5% and the time deposition is kept at 5 min. A (002)-oriented wurtzite crystal structure was confirmed by X-rays patterns; and grain size varied within the range 7.37-14.84nm, and cristanillity is calculated goes from14.4 to 45.9%. Based on UV-VIS-IR analysis, the results revealed the high transparency of the sprayed films which exceeds 90%. The band gap energy was of 3.26-3.30 eV. The film thickness was estimated by spectroscopy ellipsometry and the found values were of 165-270nm. The refractive index is in the range of 2.75.The obtained electrical parameters were around 10 18 cm -3 , 3.6 cm²/Vs, 1.6Ω.cm; 5.8cm 3 /C. finally the Sn-doping has influenced the physical parameters of asground ZnO films

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Spectroscopic ellipsometry study of transparent conductive ZnO layers for CIGS solar cell applications

Cited by 24 publications

References 18 publications

Contrasting transparent conductive properties of ZnO films on amorphous and crystalline substrates in view of thickness dependence

Contrasting transparent conductive properties of ZnO films on amorphous and crystalline substrates in view of thickness dependence

Semitransparent Conductive Thin Porous Au Films on a Thiol-containing Primer Layer formed from Au Nanoparticle Ink

Spectroscopic ellipsometry, optical, structural and electrical investigation of sprayed pure and Sn-doped ZnO thin films

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