2013
DOI: 10.1116/1.4809747
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Spectroscopic ellipsometry—A perspective

Abstract: Since its initial development in the early 1970s, spectroscopic ellipsometry (SE) has become the primary technique for determining optical properties of materials. In addition to the other historic role of ellipsometry, determining film thicknesses, SE is now widely used to obtain intrinsic and structural properties of homogeneous and inhomogeneous materials in bulk and thin-film form, including properties of surfaces and interfaces. Its nondestructive capability for determining critical dimensions has made SE… Show more

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Cited by 33 publications
(15 citation statements)
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“…Principles and applications of SE are described at length in books [46][47][48] and recent reviews. [49][50][51] Specic issues pertinent to ultrathin lms and monolayers are also addressed in ref. 52.…”
Section: Methodsmentioning
confidence: 99%
“…Principles and applications of SE are described at length in books [46][47][48] and recent reviews. [49][50][51] Specic issues pertinent to ultrathin lms and monolayers are also addressed in ref. 52.…”
Section: Methodsmentioning
confidence: 99%
“…When looking at the ellipsometric evaluation of such ultrathin overlayers, a first order approximation for the Fresnel coefficients can be used, if the substrate can be treated as a half infinite media, and the layer thickness is below 1 nm [57,68]. Then the ellipsometric equation can be simplified to yield a quadratic form.…”
Section: Ultra-thin Filmsmentioning
confidence: 99%
“…In this case it is difficult to separate the refractive index of the film and the film thickness. Consequently only the product of these parameters can be uniquely determined [57,58]. A graphical representation of this experimental limit is presented in Fig.…”
Section: Ultra-thin Filmsmentioning
confidence: 99%
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“…The calculated data are compared with the ε spectrum of a polycrystalline Cu 2 ZnGeSe 4 thin film determined by spectroscopic ellipsometry (SE) over the photon-energy range of 0.7 to 9.0 eV. SE is known to be a highly suitable method of determining ε and N spectra of semiconductors [22], and therefore, it has been used to characterize the optical properties of many solar cell absorber materials including CdTe [23,24], CuInGaSe 2 [25,26,27], Cu 2 ZnSnS 4 [28,29], and Cu 2 ZnSnSe 4 [5,30,31,32]. For Cu 2 ZnGeSe 4 , León et al [33] reported roomtemperature optical function spectra of bulk crystals.…”
Section: Introductionmentioning
confidence: 99%