Spectroscopic ellipsometry

Li, Lingjie; Lei, Jinglei; Wu, Liangliu; Pan, Fusheng

doi:10.1016/b978-0-444-63239-5.00002-0

Cited by 6 publications

(2 citation statements)

References 147 publications

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“…SE is a precise and accurate surface technique for characterizing substrates and overlayers, commonly used for the determination of basic optical parameters of thin films such as the refractive index (n) and the extinction coefficient (k), two parameters related to the interaction between materials and incident light and associated with refraction or absorption, respectively, as well as the dielectric constant (real (ε r ) and imaginary (ε i ) parts). The knowledge of optical constants provides the fundamental basis for designing and manufacturing optical devices, but morphological/structural (layer thickness or roughness) information can also be obtained by modeled analysis of the SE data [51,52]. In this context, SE is nowadays commonly used for the characterization of coatings in different fields (materials protection, photovoltaic materials, flat panel display devices, biological layers, biofilms, etc.)…”

Section: Introductionmentioning

confidence: 99%

Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material

et al. 2023

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Optical characterization of nanoporous alumina-based structures (NPA-bSs), obtained by ALD deposition of a thin conformal SiO2 layer on two alumina nanosupports with different geometrical parameters (pore size and interpore distance), was performed by two noninvasive and nondestructive techniques such as spectroscopic ellipsometry (SE) and photoluminescence (Ph) spectra. SE measurements allow us to estimate the refraction index and extinction coefficient for the studied samples and their dependence with wavelength for the 250–1700 nm interval, showing the effect of sample geometry and cover-layer material (SiO2, TiO2, or Fe2O3), which significantly affect the oscillatory character of both parameters, as well as changes associated with the light incidence angle, which are attributed to surface impurities and inhomogeneity. Photoluminescence curves exhibit a similar shape independently of sample pore-size/porosity, but they seem to affect intensity values. This analysis shows the potential application of these NPA-bSs platforms to nanophotonics, optical sensing, or biosensing.

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Section: Introductionmentioning

confidence: 99%

Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material

et al. 2023

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“…In ellipsometry, measured data is fitted to a relevant model for extracting optical properties or thickness information. Increasing the measurement data points by spectroscopic and angle-resolved acquisition is crucial for minimizing the local-minima problem [21][22][23] and increasing the sensitivity and accuracy of the fit parameters. Spectroscopic ellipsometry (SE) uses broadband illumination and obtains spectrally resolved ellipsometric data at a single angle of incidence (AOI) in a single-shot.…”

Section: Introductionmentioning

confidence: 99%

Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution

Kenaz¹,

Rapaport²

2022

Preprint

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Spectroscopic ellipsometry is a widely used optical technique both in industry and research for determining the optical properties and thickness of thin films. The effective use of spectroscopic ellipsometry on micro-structures is inhibited by technical limitations on lateral resolution and data acquisition rate. Here we introduce a spectroscopic micro-ellipsometer (SME), capable of measuring spectrally resolved ellipsometric data at many angles of incidence in a single-shot with a lateral resolution down to 2 microns. The SME can be easily integrated into generic optical microscopes by addition of a few stock optics. We demonstrate complex refractive index and thickness measurements by the SME which are in excellent agreement with a commercial spectroscopic ellipsometer. As an application for its accuracy and high lateral resolution, the SME can characterize the optical properties and number of layers of exfoliated transition-metal dichalcogenides and graphene, for structures that are a few microns in size.

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Thickness Determination of Ultrathin 2D Materials Empowered by Machine Learning Algorithms

Mao

Wang

Chen

et al. 2023

Laser & Photonics Reviews

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The number of layers of 2D materials is of great significance for regulating the performance of nanoelectronic devices and optoelectronic devices, where the optimal thickness of the target sample should be determined before further physical research or device manufacturing steps. At present, a variety of different optical technologies have been proposed to determine the thickness of samples by using the relationship between the number of layers and optical properties, including optical contrast, optical imaging, Raman spectra, photoluminescence spectra, nonlinear spectra, near‐field optical imaging, ellipsometry spectra, and hyperspectral imaging. In the past decade, the rapidly growing number of 2D materials and their heterostructures has exceeded the capacity of traditional experimental and computational methods. In recent years, machine learning (ML) is emerging as a powerful tool to support such traditional methods, which brings new opportunities to tap the potential of optical technology in a more perspicacious way. The application of optical technology has greatly facilitated the acquisition of optical information of materials, while ML algorithms provide a fast, high‐throughput, and intelligent way to complete back‐end data processing and inference. A profound integration of conventional optical technologies and ML algorithms significantly helps 2D materials progress in basic studies and practical applications and further promotes industrial manufacturing.

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Spectroscopic ellipsometry

Cited by 6 publications

References 147 publications

Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material

Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material

Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution

Thickness Determination of Ultrathin 2D Materials Empowered by Machine Learning Algorithms

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