Spectroscopic Chemical Sensing Based on Narrowband MEMS Resonant Infrared Detectors

Calisgan, Sila Deniz; Villanueva-López, Vladimir; Rajaram, Vageeswar; Qian, Zhenyun; Kang, Sungho; Hernández‐Rivera, Samuel P.; Rinaldi, Matteo

doi:10.1109/icsens.2018.8589600

Cited by 6 publications

(3 citation statements)

References 9 publications

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“…Furthermore, the microfabrication of AlN resonant devices is post-CMOS-compatible [15], enabling the integration capability of CMOS readout electronics with AlN resonant sensors on the same substrate, thus improving performance and reducing size, cost, and power consumption. Uncooled MEMS/NEMS resonant IR detectors based on AlN resonators [13], [16]- [18] and oscillators [19]- [21] have been recently demonstrated and show promising performance. Nevertheless, a fundamental challenge associated to the implementation of high performance MEMS resonant IR detectors for MWIR imaging systems is the integration of efficient MWIR absorbing materials that are also compatible with conventional transduction and microfabrication techniques.…”

Section: Introductionmentioning

confidence: 99%

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Huang

Kang

Qian

et al. 2021

J. Microelectromech. Syst.

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This article reports on the first demonstration of a high resolution (∼1.9 nW/Hz 1/2 measured in 200 Hz bandwidth) and fast (∼5.3 ms) uncooled Infrared (IR) detector based on a high frequency (172 MHz) aluminum nitride nano-plate piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a nanoelectromechanical resonator with a unique combination of optical, thermal and electromechanical properties. Sensing and actuation of a high frequency and high electromechanical performance (quality factor, Q ∼2254 and electromechanical coupling coefficient, k 2 t ∼1.4%) bulk acoustic mode of vibration in the free-standing ultrathin structure is achieved thanks to the superior piezoelectric transduction properties of the proposed metasurface. Strong absorption (60%) of mid wavelength infrared (MWIR) radiation in the ultra-low volume resonant device is obtained thanks to the properly engineered optical properties of the fishnet-like metasurface which provide multiple plasmonic resonances at 3-5 µm to the structure. The demonstrated resonant PFM detector technology marks a milestone towards the implementation of a new class of high performance, miniaturized and low power MWIR imaging systems.

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Section: Introductionmentioning

confidence: 99%

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Huang

Kang

Qian

et al. 2021

J. Microelectromech. Syst.

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“…Selective absorbers are commonly used in various fields due to their high absorptivity at specific wavelengths [ 39 ]. Spectrally selective filters can be used in various applications involving solar absorbers [ 40 ], sensors [ 41 ], passive cooling [ 21 , 42 ], and thermophotovoltaic devices [ 43 ]. Optimization of energy use could be achieved using the control of solar spectra.…”

Section: Introductionmentioning

confidence: 99%

Tungsten Based Spectrally Selective Absorbers with Anisotropic Rough Surface Texture

Pirouzfam

Şendur

2021

Nanomaterials

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Spectrally selective absorbers have received considerable interest due to their applications in thermophotovoltaic devices and as solar absorbers. Due to extreme operating conditions in these applications, such as high temperatures, thermo-mechanically stable and broadband spectrally selective absorbers are of interest. This paper demonstrates anisotropic random rough surfaces that provide broadband spectrally selective absorption for the thermo-mechanically stable Tungsten surfaces. Anisotropic random rough surface has different correlation lengths in the x- and y-directions, which means their topography parameters have directional dependence. In particular, we demonstrate that spectral absorptance of Tungsten random rough surfaces at visible (VIS) and near-infrared (NIR) spectral regions are sensitive to correlation length and RMS height variations. Our results indicate that by optimizing random rough surface parameters, absorption values exceeding 95% can be obtained. Moreover, our results indicate that anisotropic random rough surfaces broaden the bandwidth of the high absorption region. It is shown that in VIS and NIR regions, the absorption enhancements of up to 47% and 52% are achieved for the isotropic and anisotropic rough surfaces, respectively.

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“…Such devices could potentially eliminate the need for active electronics for in-sensor signal processing and seamlessly integrate the sensing and wireless readout in one battery-less package. To this end, piezoelectric RF microelectromechanical systems (MEMS) devices are particularly promising, as they offer compact and uncooled sensors monolithically integrated with acoustic readout devices that can survive on hot planets, as well as other Earth-based systems (e.g., oil, gas, and geothermal) [ 1 , 2 , 3 , 4 ].…”

Section: Introductionmentioning

confidence: 99%

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

Eisner

Chapin

et al. 2020

Sensors

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This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

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Spectroscopic Chemical Sensing Based on Narrowband MEMS Resonant Infrared Detectors

Cited by 6 publications

References 9 publications

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Tungsten Based Spectrally Selective Absorbers with Anisotropic Rough Surface Texture

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

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