Spectroellipsometric and ion beam analytical investigation of nanocrystalline diamond layers

Lohner, T.; Csíkvári, Péter; Khanh, N.Q.; Schiferl, D.; Horváth, Z.E.; Petrik, P.; Hárs, György Péter

doi:10.1016/j.tsf.2010.12.061

Cited by 6 publications

(9 citation statements)

References 29 publications

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“…32,7 For thicker NCD films modeled with a seed layer to account for the inferior diamond present at the interface with the substrate, similar thicknesses of 15–41 nm are reported. 24,26…”

Section: Resultsmentioning

confidence: 99%

Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth

et al. 2017

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With the retention of many of the unrivaled properties of bulk diamond but in thin-film form, nanocrystalline diamond (NCD) has applications ranging from micro-/nano-electromechanical systems to tribological coatings. However, with Young’s modulus, transparency, and thermal conductivity of films all dependent on the grain size and nondiamond content, compositional and structural analysis of the initial stages of diamond growth is required to optimize growth. Spectroscopic ellipsometry (SE) has therefore been applied to the characterization of 25–75 nm thick NCD samples atop nanodiamond-seeded silicon with a clear distinction between the nucleation and bulk growth regimes discernable. The resulting presence of an interfacial carbide and peak in nondiamond carbon content upon coalescence is correlated with Raman spectroscopy, whereas the surface roughness and microstructure are in accordance with values provided by atomic force microscopy. As such, SE is demonstrated to be a powerful technique for the characterization of the initial stages of growth and hence the optimization of seeding and nucleation within films to yield high-quality NCD.

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“…32,7 For thicker NCD films modeled with a seed layer to account for the inferior diamond present at the interface with the substrate, similar thicknesses of 15–41 nm are reported. 24,26…”

Section: Resultsmentioning

confidence: 99%

Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth

et al. 2017

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show abstract

Section: Contents Lists Available At Sciencedirectmentioning

confidence: 99%

“…The diamond phase is often represented by optical constants of monocrystalline diamond and nondiamond components by optical constants of glassy carbon [10,14,15] or different forms of amorphous carbon [16]. Diamond phase parameterized by Tauc-Lorentz formula can be also found in the literature [15]. Another approach (different from EMA) is parameterization of NCD effective optical constants by Lorentz [17], Tauc-Lorentz [18] or modified Sellmeier [19] dielectric functions.…”

Section: Contents Lists Available At Sciencedirectmentioning

confidence: 99%

“…In this case, a bi-layer model is frequently used [10,14,15]. It contains a thin interface (seed) layer and bulk NCD layer.…”

Section: Bilayer Modelmentioning

confidence: 99%

“…The thickness of the seed layer gives an estimate of the seeded nanodiamond surface density. In the literature, bilayer model with glassy carbon as a model of non-diamond phase is mostly used for ellipsometry characterization of NCD films deposited by MW PECVD under various conditions and reported seed layer thicknesses are 41-50 nm [14], 23-38 nm [10], and 39-41 nm [15]. Model 6aCv gives a seed layer thickness of our films in the range 15-32 nm that indicates a high density of seeded nanodiamond particles, reaching a density of 7·10 10 cm −2 as determined by AFM.…”

Section: Table 3bmentioning

confidence: 99%

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