Surface photovoltage spectroscopy equations for cathode materials with an AlxGa1−xAs buffer layer are determined in order to effectively measure the body parameters for transmission-mode (t-mode) photocathode materials before Cs-O activation. Body parameters of cathode materials are well fitted through experiments and fitting calculations for the designed AlxGa1−xAs/GaAs structure material. This investigation examines photo-excited performance and measurements of body parameters for t-mode cathode materials of different doping structures. It also helps study various doping structures and optimize structure designs in the future.OCIS After Cs-O activation, the surface barriers of GaAs photocathodes can become negative electron affinity (NEA), driving photo-excited electrons to tunnel through surface barriers into a vacuum. Thus, NEA GaAs photocathodes have been widely used in night-vision image intensifiers, photomultiplier tubes, and polarized electron sources due to their excellent wavelength response, high quantum efficiency, and good spin polarization [1] . NEA photocathodes are of two types: a reflection-mode (r-mode) cathode, in which the incident light and electron emission surface are on the same side, and a transmission-mode (tmode) cathode, in which the incident light and electron emission surface are on different sides. In practical applications, NEA photocathodes often operate in t-mode, but the measurement techniques for t-mode cathode materials before activation are inadequate [2] . As the buffer layer matching the lattice between the Si 3 N 4 antireflective film and GaAs active layer, the Al x Ga 1−x As layer helps reflect the photo-excited electrons to the active layer and finally promotes quantum efficiency for NEA photocathodes. In previous studies, the measurements for GaAs photocathodes mainly depend on the spectral response curve (SRC) after activation. However, the parameters of GaAs photocathodes cannot be effectively measured by SRC alone, because the performances of cathodes after activation are influenced not only by material parameters mainly connected with the doping structure and epitaxial growth technique, but also by surface barriers mainly related to Cs-O activation techniques. Surface photovoltage spectroscopy (SPS) is connected only to the performance of cathode materials. Thus, in recent research, SPS has been widely used to measure material parameters, such as electron diffusion length and interface recombination velocity, for cathode materials with an r-mode structure. A comparative research between SPS before activation and SRC after activation has also exactly fitted the surface escape probability [3] . The SPS fitting theory is inadequate for the t-mode material, which has a more complex structure than the r-mode cathode. Thus, the SPS research for cathode materials with the Al x Ga 1−x As buffer layer can help in further building the SPS theory for t-mode photocathodes [4] . The main difference between the t-mode and r-mode