Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology
Jonas Lochbrunner,
Korbinian Prause,
Johannes Büttner
et al.
Abstract:The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This wor… Show more
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