Spectral filtering with finitely conducting inductive grids

Kettunen, Ville; Kuittinen, Markku; Turunen, Jari; Vahimaa, Pasi

doi:10.1364/josaa.15.002783

Cited by 17 publications

(13 citation statements)

References 4 publications

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“…The residuals of the PMMA mask were removed by oxygen plasma. The Ir films were deposited in an F120 ALD reactor (ASM Microchemistry, Helsinki) at 350°C from Ir(acac) 3 and oxygen with the previously described process [7].…”

Section: Fabrication Methodsmentioning

confidence: 99%

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Free-standing inductive grid filter for infrared radiation rejection

Jefimovs

Laukkanen

Vallius

et al. 2006

Microelectronic Engineering

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Section: Fabrication Methodsmentioning

confidence: 99%

“…To reject radiation with wavelength above 1 lm the period of the grid should be less than 400 nm [3]. The thickness of the grid affects the absorption of infrared radiation, while the effective area of the holes of the grid is responsible for the transmission in the short wavelength region.…”

Section: Introductionmentioning

confidence: 99%

Free-standing inductive grid filter for infrared radiation rejection

Jefimovs

Laukkanen

Vallius

et al. 2006

Microelectronic Engineering

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“…Derrick 12 17 presented numerical results for metallic inductive grids based on the rigorous coupled wave analysis (RCWA) 18 . Their modeling was done principally for the case of rectangular scatterers and included the dielectric expansion changes suggested by Li 19 to improve the convergence of the algorithm.…”

Section: Modelingmentioning

confidence: 99%

Manufacturable IR Photonic Crystals Based on Interferometric Lithography

Brueck¹,

Malloy²

1999

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, qathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway Suite 1204 Arlington VA 22202^1302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188), Washington, DC 20503. AGENCY USE ONLY (Leave Blank)REPORT DATE ABSTRACT (Maximum 200 words)Periodic structures were designed, fabricated and characterized to control the emission of electromagnetic radiation. These electromagnetic crystals were fabricated using interferometric lithography, a technique that lends itself to large area periodic structures. The characterization was done using a Fourier Transform Infra-red Spectrometer. Extensive rigorous modeling was developed based on reigorous coupled-wave analysis and was shown to provide a route to "design-to-performace" for these structures. WWII 057 AbstractPeriodic structures were designed, fabricated and characterized to control the emission of electromagnetic radiation. These electromagnetic crystals were fabricated using interferometric lithography, a technique that lends itself to large area periodic structures. The characterization was done using a Fourier Transform Infra-red Spectrometer. Extensive rigorous modeling was developed based on rigorous coupled-wave analysis and was shown to provide a route to "design-to-performance" for these structures.Electromagnetic crystals are periodic structures that can be used to control the emission of electromagnetic radiation. The goal of the HIDE program is to directly control the emissivity of an object. The fabrication of the crystals is based on interferometric lithography (see attachment for a description of this method). This is a technique whereby two laser beams are interfered to establish a periodic pattern on a sample. Using standard lithography techniques, the pattern is transferred to the chosen material system. Currently, the material system of choice is silicon on sapphire and bulk silicon. In these material systems, we are able to etch a periodic pattern of air holes in the silicon sample. In addition, the material system can be metallized to obtain higher responsivity in a smaller area. Keep in mind that the system being tested is simply a two-dimensional electromagnetic crystal that is finite in the third dimension. Remarkably, the need for a three-dimensional structure to achieve the desired result is not apparent. We have independently shown that omni-directional stop bands can be achieved using simply a one-dimensional stack of alternating dielectric material. Although a "cute" solution, the utility of such a solution remains to be...

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“…An additional difficulty in this spectral region (compared to microwaves) is that one can no longer assume the metal to be a perfect conductor as assumed in [1][2][3][4][5]. This implies significant differences in the performance of grids with similar dimensions but fabricated in different metals, a feature that we have pointed out in a previous publication [6].…”

Section: Introductionmentioning

confidence: 99%

Inductive grid filters for rejection of infrared radiation

Jefimovs

Vallius

Kaipiainen³

et al. 2004

Journal of Modern Optics

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Inductive grid filters are metallic mesh structures, which reject long wavelengths but transmit short wavelengths. Our interest is in filters with the rejection cut-off at around 1mm. In this region the finite conductivity of metals must be considered. An extensive theoretical investigation is carried out by rigorous diffraction theory to determine the best choice of metal and the influence of the grid parameters on the spectral transmittance of the filter. Experimental results with nickel and gold grids fabricated on dielectric substrates are presented. Their fabrication process involves thin-film deposition, electron beam lithography, reactive ion etching and electroplating. The optical characterization results performed with spectrophotometry are in reasonable agreement with the theoretical predictions.

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Spectral filtering with finitely conducting inductive grids

Cited by 17 publications

References 4 publications

Free-standing inductive grid filter for infrared radiation rejection

Free-standing inductive grid filter for infrared radiation rejection

Manufacturable IR Photonic Crystals Based on Interferometric Lithography

Inductive grid filters for rejection of infrared radiation

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