Spectral and temporal control of Q-switched solid-state lasers using intracavity MEMS

Abstract

Active control of the spectral and temporal output characteristics of solid-state lasers through use of MEMS scanning micromirrors is presented. A side-pumped Nd:YAG laser with two intracavity scanning micromirrors, enabling Qswitching operation with controllable pulse duration and pulse-on-demand capabilities, is investigated. Changing the actuation signal of one micromirror allows a variation of the pulse duration between 370 ns and 1.06 µs at a pulse repetition frequency of 21.37 kHz and average output power of 50 mW. Pulse-on-demand lasing is enabled through actuation of the second micromirror. To our knowledge this is the first demonstration of the use of multiple intracavity MEMS devices as active tuning elements in a single solid-state laser cavity. Furthermore, we present the first demonstration of control over the output wavelength of a solid-state laser using a micromirror and a prism in an intracavity Littman configuration. A static tilt actuation of the micromirror resulted in tuning the output wavelength of an Yb:KGW laser from 1024 nm to 1031.5 nm, with FWHM bandwidths between 0.2 nm and 0.4 nm. These proof-ofprinciple demonstrations provide the first steps towards a miniaturized, flexible solid-state laser system with potential defense and industrial applications.

MEMS micromirror based light sheet generator for biomedical imaging

“…The two single crystal silicon micromirrors are used for light sheet generation and its positioning in the focal plane. They have electrostatic (ES) comb-drive actuation for the 1D scan of a laser point source and electrothermal (ET) actuation for 2D tip-tilt control to position the light sheet in the focal plane [4]. The illumination system uses a fiber-coupled 488nm Argon-Ion laser as source and is experimentally evaluated for its spatial characteristics in the focal plane.…”