Spectra of rubidium-like Pd X-Sn XIV ions

Ryabtsev, A. N.; Kononov, É. Ya.; Churilov, S S

doi:10.1134/s0030400x08120060

Cited by 30 publications

(56 citation statements)

References 10 publications

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“…This transition is predicted by FSCC to occur near 13 144 cm −1 (see Table III), in agreement with the 13 212(25) cm −1 obtained from the EUV spectra in Refs. [7,8]. The brightest line, observed at 758.8(4) nm wavelength or 13 179(8) cm −1 is an excellent match for it.…”

Section: Resultsmentioning

confidence: 65%

Analysis of the fine structure ofSn11+–Sn14+ions by optical spectroscopy in an electron-beam ion trap

et al. 2016

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We experimentally re-evaluate the fine structure of Sn 11+...14+ ions. These ions are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic structure is an open challenge for both theory and experiment. We combine optical spectroscopy of magnetic dipole M 1 transitions, in a wavelength range covering 260 nm to 780 nm, with charge-state selective ionization in an electron beam ion trap. Our measurements confirm the predictive power of ab initio calculations based on Fock space coupled cluster theory. We validate our line identification using semi-empirical Cowan calculations with adjustable wavefunction parameters. Available Ritz combinations further strengthen our analysis. Comparison with previous work suggests that line identifications in the EUV need to be revisited. arXiv:1605.04236v1 [physics.atom-ph]

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Section: Resultsmentioning

confidence: 65%

Analysis of the fine structure ofSn11+–Sn14+ions by optical spectroscopy in an electron-beam ion trap

et al. 2016

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“…Highly charged tin ions in laser-produced transient plasmas are the atomic sources of EUV light at 13.5-nm wavelength for nanolithography [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. In state-of-the-art EUV sources such plasmas are produced by irradiation of micrometer-sized tin droplets with high-power CO 2 -gaslaser pulses [16][17][18] in a two-step process where first a laser prepulse [16][17][18][19][20][21][22][23] shapes the droplet into a target optimized for EUV production with a second, more energetic pulse.…”

Section: Introductionmentioning

confidence: 99%

Efficient Generation of Extreme Ultraviolet Light From Nd :YAG-Driven Microdroplet-Tin Plasma

et al. 2019

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We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-μm-wavelength Nd:YAG drive laser. Combining spectroscopic data with absolute measurements of the emission into the 2% bandwidth around 13.5 nm relevant for nanolithographic applications, the plasma's efficiency in radiating EUV light is quantified. All observed dependencies of this radiative efficiency on the experimental parameters are successfully captured in a geometrical model featuring the plasma absorption length as the primary parameter. It is found that laser intensity is the pertinent parameter setting the plasma temperature and the tin-ion charge-state distribution when varying laser pulse energy and duration over almost 2 orders of magnitude. These insights enabled us to obtain a record-high 3.2% conversion efficiency of laser light into 13.5-nm radiation and to identify paths towards obtaining even higher efficiencies with 1-μm solid-state lasers that may rival those of current state-of-the-art CO 2-laser-driven sources.

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“…Out of all resonance transitions only the 4d k -4d k−1 4p (k = 9-6) ones were previously studied in the silver spectra of the lower ionization stages: Ag III [1], Ag IV [2], Ag V [3] and Ag VI [4]. On the other hand, all three resonance transition arrays were investigated in rather simple spectra of ions having 4d and 4d 2 ground-state configurations: Ag XI [5,6] and Ag X [7]. In this article we report the results of the study of the Ag VII, Ag VIII and Ag IX to fill the gap between the Ag VI and Ag X isonuclear spectra.…”

Section: Introductionmentioning

confidence: 99%

Resonance Transitions in the Spectra of the Ag6+–Ag8+ Ions

Ryabtsev¹,

Kononov²

2017

Atoms

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Abstract:The spectrum of silver, excited in a vacuum spark, was recorded in the region 150-350 Å on a 3-m grazing incidence spectrograph. The resonance 4d k -(4d k−1 5p + 4d k−1 4f + 4p 5 4d k+1 ) was studied in the Ag 6+ -Ag 8+ spectra (Ag VII-Ag IX) with k = 5-3, respectively. Several hundred lines were identified with the aid of the Cowan code and orthogonal operator technique calculations. The energy levels were found and the transition probabilities were calculated.

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Spectra of rubidium-like Pd X-Sn XIV ions

Cited by 30 publications

References 10 publications

Analysis of the fine structure ofSn11+–Sn14+ions by optical spectroscopy in an electron-beam ion trap

Analysis of the fine structure ofSn11+–Sn14+ions by optical spectroscopy in an electron-beam ion trap

Efficient Generation of Extreme Ultraviolet Light From Nd :YAG-Driven Microdroplet-Tin Plasma

Resonance Transitions in the Spectra of the Ag6+–Ag8+ Ions

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