Spatial characterization of pressure-based plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy

Abstract

PAPER Bordel et al. Spatial characterization of pressurebased plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy

New mass spectrometry techniques for studying physical chemistry of atmospheric heterogeneous processes

“…Although the depth resolution of this technique is substantially higher than in LA-ICPMS, the lateral resolution is defined by the plasma size and typically is on the order of millimeters. Spatially resolved optical emission measurements identified two different RF-GD plasma regimes above a pure copper target [170]. The two plasma regimes resulted in similar sputtering rates but different plasma composition, demonstrating the complexity of the plasma-formation process.…”

An improved analytical performance of magnetically boosted radiofrequency glow discharge

“…The in-house rf-GD-OES experimental setup used in this work was described elsewhere by Valledor et al 29 It consists of a modified Grimm type GD anode, similar to the GD source previously designed by Pisonero et al, 30,31 and coupled to a quartz cylinder by means of a flat seal. On the other side of the cylinder a metallic piece provides two symmetric vacuum exits and an additional upper exit for the gauge pressure connection (MKS Baratron capacitance pressure transducer, Model 122B).…”

Atomic Spectroscopy

“…The Oviedo group also reported on the analytical capabilities of continuous rf GD-OES, − which was found to be a promising tool for the depth profiling analysis of challenging materials, such as self-aligned nanotubes and arrays of nanowires . In ref , a method for improved analytical performance of rf GD-OES for nonconductive samples was presented.…”

“…In addition, a magnetic field was applied to obtain higher sputter rates and better ionization and excitation efficiencies, yielding higher emission intensities. Finally, in ref , a new experimental setup was presented to perform spatially resolved measurements of the optical emission intensities in an rf GD. The emitted radiation was not only detected through an end-on window but also by axially resolved side-on measurements.…”