Spatial characterization of interstitial oxygen and its related defects in Czochralski silicon wafers and ingots: A way to improve the material and device quality

Martel, Benoît; Veirman, Jordi; Cascant, M.; Enjalbert, N.; Tomassini, M.; Peyronnet, Rafaël; Stadler, Johannes; Fayard, E.; Dubois, Sébastien; Raymond, G.; Brun, Xavier F.; Bonnard, P.

doi:10.1109/pvsc.2015.7355686

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Wafer Growth1

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“…Although it is not harmful, it does can impact the overall performance of chips made by the silicon rods. A new technology called the OXYMAP technology can be used to monitor the oxygen concentration during the Cz process [3].…”

Section: Wafer Growthmentioning

confidence: 99%

IC Circuits—Soul of Modern Society

Han¹

2022

Advances in Social Science, Education and Humanities Research

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Almost every technology people used from last century till today contains components of Integrated circuits. In order to present the significance of chips, this article is going to go through the fabrication of chips-from chip design, wafer growth, wafer fabrication to package and testing. Moreover, a generalization of the chip categories will be discussed and an evaluation of the importance of chips will be presented in this paper as well.

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Section: Wafer Growthmentioning

confidence: 99%