Space-and Time-Resolved E–H Transition in an Inductively Coupled Plasma in Ar

Abstract

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E-to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p 1 ) shows the temporal change of the active area for the plasma production as a function of time.Index Terms-E-H transition, inductively coupled plasmas (ICPs), optical emission spectroscopy (OES).

Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

“…The temporal 2D optical observation is carried out using an ICCD camera, set up perpendicular to the single coil plane considering the electronics between the time sweep of the external coil current and the optical observation. The ICP reactor and the external circuit have been described in our previous papers [14,16]. Figure 1 shows a schematic diagram of the optical measurement for the spatiotemporal E-to-H transition in the present ICP.…”

Atomic Spectrometry Update. Advances in atomic spectrometry and related techniques

“…The same group of authors 152 have further studied the SHIP torch using a variety of thermometric probes: the Boltzmann plot method was used to obtain T rot ¼ 3100-4000 K and T exc ¼ 5000-8000 K; the line-to-continuum method yielded T e ¼ 9000 K in the central channel; the H b line method gave n e ¼ 5-8 Â 10 15 cm À3 ; and T ion ¼ 6250-7750 K depending on observation height. The temporal transition from E-to H-mode in an ICP has been studied by Hirao et al 153 using a CCD camera to axially image the plasma. Horner et al 154 have simulated solute-particle vaporization in an ICP as a function of operating conditions and particle characteristics.…”