In the millimeter‐wave range up to 100 GHz, the equipment and methods of measurement have been extended from the microwave domain. The major problems in the millimeter field are due to the small size of the devices and the transmission line losses. Above 100 GHz, as an alternative, other equipment and methods of measurement, using a quasioptic setup, have been developed or adapted from far‐infrared techniques (dielectric waveguide cavity resonator, free‐space methods).