Some properties of TiO2 layers prepared by medium frequency reactive sputtering

Surface Morphological and Electrical Properties of Sputtered Tio2 Thin Films

“…It is well known that titania exhibits three distinct crystalline forms apart from the amorphous form: an orthorhombic one, the brookite and two tetragonal phases, the anatase and the rutile [7,8]. The occurrence of anatase and rutile phase depends significantly on the method and conditions of deposition as well as the substrate temperature [9]. Each crystalline form is convenient for a different purpose.…”

Structural, Dielectric and Optical properties of Sputtered TiO2 nano-films

“…The decomposition of organic compounds on the surface of TiO 2 and the reduction of the contact angle between water and the surface of TiO 2 under UV irradiation results in self-cleaning and anti-fogging effects [7]. It is well known that titania exhibits three distinct crystalline forms apart from the amorphous form: an orthorhombic one, the brookite and two tetragonal phases, the anatase and the rutile [8,9]. The occurrence of anatase and rutile phase depends significantly on the method and conditions of deposition as well as the substrate temperature [10].…”

Study of Structure Densification in TiO2Coatings Prepared by Magnetron Sputtering under Low Pressure of Oxygen Plasma Discharge

“…Magnetron sputtering allows for the deposition of various types of materials from metals through semiconductors to oxides [1,2]. Thin films are deposited by sputtering a source material (metallic or ceramic) by ions of a working gas.…”

“…jaroslaw.domaradzki@pwr.wroc.pl gas mixture and usually a sharp hysteresis loop -transition mode is present [2]. However, as the oxygen ratio increases, deposition rate decreases due to target oxidation.…”