2023
DOI: 10.1116/6.0003136
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Some considerations in nanoindentation measurement and analysis by atomic force microscopy

Irit Rosenhek-Goldian,
Sidney R. Cohen

Abstract: Atomic force microscopy is highly suited for characterizing morphology and physical properties of nanoscale objects. The application of this technique to nanomechanical studies is, therefore, exploited in a wide range of fields from life sciences to materials science and from miniature devices to sensors. Although performing a mechanical measurement can be straightforward and accessible to novice users, obtaining meaningful results requires knowledge and experience not always evident in standard instrumental s… Show more

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