1993
DOI: 10.1016/0040-6090(93)90229-i
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Some characteristics of heavily Be-doped GaAs layers grown by molecular beam epitaxy

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Cited by 6 publications
(2 citation statements)
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“…3, consisted of modifications to the nominal doping levels to optimize the metamorphic TJs. One TJ was grown with n-and p-type doping levels of 2×10 19 and 6×10 19 cm -3 , respectively (GaAsP-B), to test the capability of achieving higher p-type doping levels, given the lack of Be amphoteric behavior as reported in the literature, [7] and the other grown with n-and p-type doping levels of 1×10 19 and 6×10 19 cm -3 (GaAsP-C), respectively, to ascertain whether the n-type material was experiencing amphoteric behavior.…”
Section: Tunnel Junction Characterizationmentioning
confidence: 99%
“…3, consisted of modifications to the nominal doping levels to optimize the metamorphic TJs. One TJ was grown with n-and p-type doping levels of 2×10 19 and 6×10 19 cm -3 , respectively (GaAsP-B), to test the capability of achieving higher p-type doping levels, given the lack of Be amphoteric behavior as reported in the literature, [7] and the other grown with n-and p-type doping levels of 1×10 19 and 6×10 19 cm -3 (GaAsP-C), respectively, to ascertain whether the n-type material was experiencing amphoteric behavior.…”
Section: Tunnel Junction Characterizationmentioning
confidence: 99%
“…While Si is an excellent n-type dopant for all III–V compounds, several drawbacks remain for p-type doping. Be presents a near-unity sticking coefficient and low vapor pressure at the usual growth conditions used in molecular beam epitaxy (MBE). However, diffusion and incorporation of Be at interstitial sites have limited doping levels above mid-10 19 cm –3 . At elevated concentrations, relevant lattices distortions are created because the covalent radius of Be is much shorter than those of both As and Ga atoms.…”
Section: Introductionmentioning
confidence: 99%