1992
DOI: 10.1002/sia.740190106
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Some Applications of high‐energy, high‐resolution Auger electron spectroscopy using bremsstrahlung radiation

Abstract: Continuous energy distribution x-rays obtained from a high-voltage (20-30 kV) source with an Mo anode were used for exciting Si KLL, S KLL, Ag LMM and Mn KLL Auger transitions in the 1.5-5.5 keV kinetic energy range. X-ray-induced AES measurements were performed by a new, higbenergy electron spectrometer demoastrating the obtainable resolution and the considerable gain in intensity in comparison with previous results.

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Cited by 114 publications
(33 citation statements)
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“…32 The analyzer works in a fixed retardation ratio mode with a relative energy resolution of 5×10 -3 . In the present experiments the used pass energies were around 100 eV, and in this way the analyzer energy resolution was around 0.5 eV.…”
Section: -21mentioning
confidence: 99%
“…32 The analyzer works in a fixed retardation ratio mode with a relative energy resolution of 5×10 -3 . In the present experiments the used pass energies were around 100 eV, and in this way the analyzer energy resolution was around 0.5 eV.…”
Section: -21mentioning
confidence: 99%
“…[14] The spectrometer consists of a 180 • hemispherical electrostatic analyzer with a 250-mm working radius, floatable up to 10 keV and completed with a multielement zooming electron-optical lens. During the measurements, the vacuum in the analysis chamber was better than 5 × 10 −9 mbar.…”
Section: Methodsmentioning
confidence: 99%
“…The ESA-31 spectrometer equipped with a high luminosity and high resolution analyser was applied [34]. The electron gun (type VG LEG62, V.G.…”
Section: Methodsmentioning
confidence: 99%