Most two-dimensional (2D) semiconductors
suffer from intrinsic
instability under ambient conditions, especially 2D black phosphorus
(BP). Although much effort has been made to study the passivation
of 2D materials against corrosion by oxygen and water molecules, facile
and effective passivation with long-term stability is still challenging;
in particular, selective passivation, which is critical for integration
into nanoelectronics, is still lacking. Here, we develop a novel passivation
route for BP using a fluorinated self-assembled thin film of PFSA
(perfluorosulfonic acid, PFSA), where the surface modifier with high
hydrophobicity on BP presents extremely stable characteristics over
five months under ambient conditions. Moreover, we report for the
first time in situ cleaning and selective fluorination
of only BP flakes on a SiO2/Si substrate by a spin-coating
process followed by ultrasonication, which was attributed to the formation
of P–F covalent bonds on the BP surface. Selectively fluorinated
BP shows not only enhanced stability in air but also electrical properties
of the BP field-effect transistor (FET), with the on-current of the
BP FET increasing and presenting enhanced carrier mobility (125 cm2 V–1 s–1) and on/off ratio
(104). This significant finding sheds light on fabricating
vertical 2D heterostructures to realize high performance and reliability
with versatile 2D materials. This work demonstrates an emerging passivation
approach for long-term stability together with superior electrical
properties, which paves the way for integrating 2D semiconductors
into critical channel materials in FETs that are favorable for next-generation
digital logic circuits.