Abstract:Solid state sensors provide an indispensable link for gathering, processing, and communicating information between microsystems, users and the nonelectronic world. As the microsystem technology rapidly gains importance in the market, solid-state sensors have become an important key factor on determining the performance of the microsystem and opening new market area for future VLSI (verylarge-scale-integrated) systems. Significant advances have been made in developing new integrated sensors and microsystems. fo… Show more
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