2020
DOI: 10.1109/mmm.2020.2993478
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Solid-State Qubits: 3D Integration and Packaging

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Cited by 45 publications
(29 citation statements)
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“…Air bridges over cavities are proposed to connect both sides of ground planes to improve the distribution of current density. 83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss.…”
Section: Geometric Considerationsmentioning
confidence: 99%
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“…Air bridges over cavities are proposed to connect both sides of ground planes to improve the distribution of current density. 83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss.…”
Section: Geometric Considerationsmentioning
confidence: 99%
“…83,85 Air bridges also facilitate two cavities crossing each other and provide a geometric flexibility for quchip layout. 85 One disadvantage of coplanar cavities is that more than 80% of electrical field travels through the dissipative silicon substrate resulting in energy loss. Comparing with cylindrical 3D cavities, the resonance lifetime is about one magnitude of order shorter.…”
Section: Geometric Considerationsmentioning
confidence: 99%
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