1994
DOI: 10.1557/proc-339-741
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Solid-State NMR Studies of the Bonding Structure of Diamondlike Amorphous Carbon Films

Abstract: Amorphous carbon films are (a-C:H) of interest because of their useful physical properties. They are extremely hard and chemically inert, resisting degradation by both acids and alkalis. They are insoluble and can be conformably coated onto virtually any substrate. These properties make the films ideal protective coatings on magnetic disks and tools. We have studied several thin (one to two micron) films prepared by plasma enhanced chemical vapor deposition with varying radiofrequency fields strengths to deter… Show more

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