2018
DOI: 10.1186/s11671-018-2463-z
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Solid-State Nanopore

Abstract: Solid-state nanopore has captured the attention of many researchers due to its characteristic of nanoscale. Now, different fabrication methods have been reported, which can be summarized into two broad categories: “top-down” etching technology and “bottom-up” shrinkage technology. Ion track etching method, mask etching method chemical solution etching method, and high-energy particle etching and shrinkage method are exhibited in this report. Besides, we also discussed applications of solid-state nanopore fabri… Show more

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Cited by 48 publications
(35 citation statements)
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“…Third, according to present fabrication methods, it is difficult to fabricate a two-nanopore system and optical trap nanopore system with high accuracy and Si probe No need for nanopores addressing Adjacent DNA affects accuracy~0.1 [32] reproducibility, which is very significant for nanopore DNA detection. A helium ion beam may be the key technology to solve this problem [11,58]. Thus, we expect that DNA nanopore sequencing will continue to be a research focus and can be integrated with more new ideas and innovative approaches to realize low error rates, rapid and high parallel recording, and long read lengths of up to 100 kilobases.…”
Section: Resultsmentioning
confidence: 99%
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“…Third, according to present fabrication methods, it is difficult to fabricate a two-nanopore system and optical trap nanopore system with high accuracy and Si probe No need for nanopores addressing Adjacent DNA affects accuracy~0.1 [32] reproducibility, which is very significant for nanopore DNA detection. A helium ion beam may be the key technology to solve this problem [11,58]. Thus, we expect that DNA nanopore sequencing will continue to be a research focus and can be integrated with more new ideas and innovative approaches to realize low error rates, rapid and high parallel recording, and long read lengths of up to 100 kilobases.…”
Section: Resultsmentioning
confidence: 99%
“…Significant progress has been made in DNA sequencing by nanopores, such as solid-state nanopores [2,11] and protein nanopores [2,7]. DNA sequencing by protein nanopores has been achieved [7].…”
Section: Introductionmentioning
confidence: 99%
“…This method allows precise control of the pore size, low cost of fabrication and ideal conditions for automation. [7][8][9][10] In the electrochemical etching process, a solid-state material is placed between an etching agent and a stopping solution. 11 Once the pore is formed, chemical braking takes place thus concluding the process.…”
Section: Introductionmentioning
confidence: 99%
“…As a fundamental issue, the fabrication of solid-state nanopores inspired extensive studies. Extensive reviews on the fabrication of nanopores have been published by various groups [39,40,41]. Although technologies, such as focused ion beam (FIB) and focused electron beam (FEB) drilling, are widely used, they can only fabricate nanopores one by one on thin membranes with thicknesses < 100 nm.…”
Section: Introductionmentioning
confidence: 99%