1993
DOI: 10.1021/ac00057a021
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Solid-state detector for ICP-OES

Abstract: A new type of solid-state detector has been designed to meet the needs of inductively coupled plasma optical emission spectroscopy (ICP-OES), including high quantum efficiency in the UV, low noise, wide dynamic range, rapid readout, broad spectral coverage, and high spectral resolution. The device is based on buried-channel chargecoupled-device (CCD) technology with unique features for optical emission spectroscopy and is matched to a specific echelle grating optical system described in the companion paper. It… Show more

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Cited by 112 publications
(44 citation statements)
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“…Since VUV photons interact within the first atomic layers, the effect of the magnetic field on the photoelectrons and subsequent secondary electrons diffusion may be responsible for increased charge carrier losses to the front electrode with increasing magnetic field. Penetration depths in Si are about 5 nm and 1 mm for 172-and 520-nm photons [22], respectively, and 22 mm for 5.4-keV X-rays [23].…”
Section: Resultsmentioning
confidence: 99%
“…Since VUV photons interact within the first atomic layers, the effect of the magnetic field on the photoelectrons and subsequent secondary electrons diffusion may be responsible for increased charge carrier losses to the front electrode with increasing magnetic field. Penetration depths in Si are about 5 nm and 1 mm for 172-and 520-nm photons [22], respectively, and 22 mm for 5.4-keV X-rays [23].…”
Section: Resultsmentioning
confidence: 99%
“…This is due to the difference in the average interaction depth of the photons, which is approximately 1 μm for 520-nm photons and approximately 5 nm for 172-nm photons [29]. VUV photons interact mainly within the first atomic layers of the wafer, where the electric field is weaker.…”
Section: Wwwintechopencommentioning
confidence: 99%
“…Obviously, such a detector would be expensive, but similar detectors are in use already in echelle spectrometers for ICP OES. [29][30][31] However, the only functional multi-element CS AAS instrument built up until now is that described by Harnly et al 14 back in 1979.…”
Section: The Continuum Sourcementioning
confidence: 99%